“…Besides that, when the surface of the sample is bombarded by He + , the penetration of the beam is smaller, when compared to an electron beam accelerated to 30 kV, improving the resolution (Chen et al, 2011). The secondary electron yield is much higher than in SEM, giving to the images a better signal-to-noise ratio (Inai et al, 2007;Joens et al, 2013). Additionally, there is no need for metal coating of the samples, due to the unique charge compensation mechanism in HIM (Joy, 2013, Hlawacek et al, 2014.…”