Helium Ion Microscope Fabrication of Solid-State Nanopore Devices for Biomolecule Analysis

Zahid, Osama K.; Hall, Adam R.

doi:10.1007/978-3-319-41990-9_18

Cited by 10 publications

(2 citation statements)

References 82 publications

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“…Through the implementation of automated stage movement and milling routines, patterning over large areas with high accuracy can be achieved [ 158 ]. A review of solid-state nanopore fabrication by helium FIB milling for the detection and analysis of biomolecules can be found in [ 159 ]. In closely related work, the translocation of virus particles (rod-shaped tobacco mosaic virus) through solid-state helium FIB nanopores has also been reported [ 160 ].…”

Section: Reviewmentioning

confidence: 99%

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

Allen¹

2021

Beilstein J. Nanotechnol.

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The helium ion microscope has emerged as a multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofabrication tasks. Operation of the ion source with neon has extended the reach of this technology even further. This paper reviews the materials modification research that has been enabled by the helium ion microscope since its commercialization in 2007, ranging from fundamental studies of beam–sample effects, to the prototyping of new devices with features in the sub-10 nm domain.

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Section: Reviewmentioning

confidence: 99%

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

Allen¹

2021

Beilstein J. Nanotechnol.

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“…One of the HIBs emitted from three atoms of the trimer is chosen for the high-resolution HIM imaging. Changing the gas pressure allows for controlled operation of the HIB current between fA and pA levels to meet the high-resolution requirements of various applications [2,3]. HIM has significant advantages over a focused ion beam (FIB) with gallium source and scanning electron microscope (SEM), including highresolution, high-sensitivity, high-SE yield, and long-depth of focus with several novel contrast mechanisms for imaging applications [4].…”

Section: Introductionmentioning

confidence: 99%

Helium-ion-beam nanofabrication: extreme processes and applications

He¹,

Tian²,

Wu³

et al. 2021

Int. J. Extrem. Manuf.

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Helium ion beam (HIB) technology plays an important role in the extreme fields of nanofabrication. This paper reviews the latest developments in HIB technology as well as its extreme processing capabilities and widespread applications in nanofabrication. HIB-based nanofabrication includes direct-write milling, ion beam-induced deposition, and direct-write lithography without resist assistance. HIB nanoscale applications have also been evaluated in the areas of integrated circuits, materials sciences, nano-optics, and biological sciences. This review covers four thematic applications of HIB: (1) helium ion microscopy imaging for biological samples and semiconductors; (2) HIB milling and swelling for 2D/3D nanopore fabrication; (3) HIB-induced deposition for nanopillars, nanowires, and 3D nanostructures; (4) additional HIB direct writing for resist, graphene, and plasmonic nanostructures. This paper concludes with a summary of potential future applications and areas of improvement for HIB extreme nanofabrication technology.

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Ion Microscopy

Hlawacek¹

2019

Springer Handbook of Microscopy

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Helium Ion Microscope Fabrication of Solid-State Nanopore Devices for Biomolecule Analysis

Cited by 10 publications

References 82 publications

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

Helium-ion-beam nanofabrication: extreme processes and applications

Ion Microscopy

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