Helium focused ion beam direct milling of plasmonic heptamer-arranged nanohole arrays

Hahn, Choloong; Hajebifard, Akram; Berini, Pierre

doi:10.1515/nanoph-2019-0385

Cited by 33 publications

(25 citation statements)

References 25 publications

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“…The gold nanoantenna and connectors can be defined via electron beam lithography and lift-off [39]. The small gaps can be machined via helium (He) focused ion beam (HeFIB) milling [40]. The conformal thin insulator layer can be created via atomic layer deposition (ALD) [41].…”

Section: Plasmonic Pixel Designmentioning

confidence: 99%

Tunable Plasmonic Metasurfaces for Optical Phased Arrays

Lesina

Goodwill

Bernier

et al. 2021

IEEE J. Select. Topics Quantum Electron.

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Controlling the phase and amplitude of light emitted by the elements (i.e., pixels) of an optical phased array is of paramount importance to realizing dynamic beam steering for LIDAR applications. In this paper, we propose a plasmonic pixel composed of a metallic nanoantenna covered by a thin oxide layer, and a conductive oxide, e.g., ITO, for use in a reflectarray metasurface. By considering voltage biasing of the nanoantenna via metallic connectors, and exploiting the carrier refraction effect in the metaloxide-semiconductor capacitor in the accumulation and depletion regions, our simulations predict control of the reflection coefficient phase over a range > 330 • with a nearly constant magnitude. We discuss the physical mechanism underlying the optical response, the effect of the connectors, and propose strategies to maximize the magnitude of the reflection coefficient and to achieve dual-band operation. The suitability of our plasmonic pixel design for beam steering in LIDAR is demonstrated via 3D-FDTD simulations.

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Section: Plasmonic Pixel Designmentioning

confidence: 99%

Tunable Plasmonic Metasurfaces for Optical Phased Arrays

Lesina

Goodwill

Bernier

et al. 2021

IEEE J. Select. Topics Quantum Electron.

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“…A He + FIB system provides very small milling currents (0.1 nA) and an ultra-narrow beam spot of less than 0.5 nm [ 46 ] with milling resolution of 3.5 nm [ 47 ]. The direct He + FIB milling of an Au film was able to produce high-quality nanostructures, such as plasmonic systems consisting of seven close-packed holes, with a 100 nm diameter and very sharp edges, separated from each other by only 15 nm, [ 48 ] as shown in Figure 1 b. Moreover, in this case, a limited effect of material redeposition from the substrate has been observed.…”

Section: Focused Ion Beam Processingmentioning

confidence: 99%

“…The array consists of seven close-packed holes with 100nm diameter and separated by 15nm of sharp edges without milled material redeposition. Reproduced with permission from [ 48 ]. ( c ) Scheme of the focused ion beam induced deposition (FIBID) procedure: The ions coming from the beam decompose the precursor molecules coming from the gas injection systems leaving a deposit on the substrate.…”

Section: Figurementioning

confidence: 99%

Focused Ion Beam Processing for 3D Chiral Photonics Nanostructures

et al. 2020

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The focused ion beam (FIB) is a powerful piece of technology which has enabled scientific and technological advances in the realization and study of micro- and nano-systems in many research areas, such as nanotechnology, material science, and the microelectronic industry. Recently, its applications have been extended to the photonics field, owing to the possibility of developing systems with complex shapes, including 3D chiral shapes. Indeed, micro-/nano-structured elements with precise geometrical features at the nanoscale can be realized by FIB processing, with sizes that can be tailored in order to tune optical responses over a broad spectral region. In this review, we give an overview of recent efforts in this field which have involved FIB processing as a nanofabrication tool for photonics applications. In particular, we focus on FIB-induced deposition and FIB milling, employed to build 3D nanostructures and metasurfaces exhibiting intrinsic chirality. We describe the fabrication strategies present in the literature and the chiro-optical behavior of the developed structures. The achieved results pave the way for the creation of novel and advanced nanophotonic devices for many fields of application, ranging from polarization control to integration in photonic circuits to subwavelength imaging.

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“…Additionally, the heavier ions, most commonly gallium ions, used for creating the nanostructures easily contaminate the sample by implanting the heavy metal and have low resolution compared to EBL [37]. However, with the recent development of technologies, helium ion beams can now be used to create a nanostructured thin film with a resolution of 3.5 nm [49].…”

Section: Pantf By Removal Of Materialsmentioning

confidence: 99%

“…Recently, many other techniques have been developed and improved to create nanohole arrays and are used for various applications. Nevertheless, FIB is still improving and is widely used for preparing nanoholes in varieties of the shape because of its nanometer resolution and template-free nanostructure forming capacity [49].…”

Section: Pantfs With Gapsmentioning

confidence: 99%

Plasmonic-Active Nanostructured Thin Films

2020

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Plasmonic-active nanomaterials are of high interest to scientists because of their expanding applications in the field for medicine and energy. Chemical and biological sensors based on plasmonic nanomaterials are well-established and commercially available, but the role of plasmonic nanomaterials on photothermal therapeutics, solar cells, super-resolution imaging, organic synthesis, etc. is still emerging. The effectiveness of the plasmonic materials on these technologies depends on their stability and sensitivity. Preparing plasmonics-active nanostructured thin films (PANTFs) on a solid substrate improves their physical stability. More importantly, the surface plasmons of thin film and that of nanostructures can couple in PANTFs enhancing the sensitivity. A PANTF can be used as a transducer for any of the three plasmonic-based sensing techniques, namely, the propagating surface plasmon, localized surface plasmon resonance, and surface-enhanced Raman spectroscopy-based sensing techniques. Additionally, continuous nanostructured metal films have an advantage for implementing electrical controls such as simultaneous sensing using both plasmonic and electrochemical techniques. Although research and development on PANTFs have been rapidly advancing, very few reviews on synthetic methods have been published. In this review, we provide some fundamental and practical aspects of plasmonics along with the recent advances in PANTFs synthesis, focusing on the advantages and shortcomings of the fabrication techniques. We also provide an overview of different types of PANTFs and their sensitivity for biosensing.

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Helium focused ion beam direct milling of plasmonic heptamer-arranged nanohole arrays

Cited by 33 publications

References 25 publications

Tunable Plasmonic Metasurfaces for Optical Phased Arrays

Tunable Plasmonic Metasurfaces for Optical Phased Arrays

Focused Ion Beam Processing for 3D Chiral Photonics Nanostructures

Plasmonic-Active Nanostructured Thin Films

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