Helicon plasma source excited by a flat spiral coil

Stevens, J.; Sowa, Mark J.; Cecchi, J. L.

doi:10.1116/1.579491

Cited by 63 publications

(29 citation statements)

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“…[28][29][30] Finally, by using only the bottom coil, the helicon discharge is generated. 33,34 A similar helicon configuration is reported by Stevens et al 35 Time-varying magnetic fields are measured via a bare single induction loop ͑B-dot probe͒. 27 The probe is immersed into the plasma in the upstream and downstream plane for radial measurements.…”

Section: Methodsmentioning

confidence: 98%

Wave propagation and noncollisional heating in neutral loop and helicon discharges

et al. 2011

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Heating mechanisms in two types of magnetized low pressure rf ͑13.56 MHz͒ discharges are investigated: a helicon discharge and a neutral loop discharge. Radial B-dot probe measurements demonstrate that the neutral loop discharge is sustained by helicon waves as well. Axial B-dot probe measurements reveal standing wave and beat patterns depending on the dc magnetic field strength and plasma density. In modes showing a strong wave damping, the plasma refractive index attains values around 100, leading to electron-wave interactions. In strongly damped modes, the radial plasma density profiles are mainly determined by power absorption of the propagating helicon wave, whereas in weakly damped modes, inductive coupling dominates. Furthermore, an azimuthal diamagnetic drift is identified. Measurements of the helicon wave phase demonstrate that initial plane wave fronts are bent during their axial propagation due to the inhomogeneous density profile. A developed analytical standing wave model including Landau damping reproduces very well the damping of the axial helicon wave field. This comparison underlines the theory whereupon Landau damping of electrons traveling along the field lines at speeds close to the helicon phase velocity is the main damping mechanism in both discharges.

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Section: Methodsmentioning

confidence: 98%

Wave propagation and noncollisional heating in neutral loop and helicon discharges

et al. 2011

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“…The plasma generating wave is launched by the induced electric field of a flat coil antenna [7,8]. Details of the setup are described in [9], Langmuir-probe measurements of the plasma density and Bdot measurements of the wave field will be described in [10].…”

Section: Helicon Dischargementioning

confidence: 99%

Argon ion velocity distributions in a helicon discharge measured by laser induced fluorescence

Luggenhölscher

Çelik

et al. 2010

J. Phys.: Conf. Ser.

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Argon ion velocity distributions in a helicon discharge measured by laser induced fluorescence Abstract. A Helicon discharge in argon at low gas pressure of 0.1 Pa is generated with a flat coil antenna operated with 13.56 MHz. The power coupled into the discharge is around 1 kW which leads to an electron density of 10 12 cm -3 . The velocity and temperature of the argon ions is measured by laser induced fluorescence (LIF) spatially resolved in radial and axial direction. Ambipolar diffusion accelerates the ions out of the heating region of the discharge with velocities up to 800 m/s. Due to homogenisation of the kinetic energy, the ion temperature increases from 0.15 eV in the centre to 0.4 eV at the edge of the plasma volume.

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“…The usual approach is to make use of 2.45 GHz with a resonant B field equal to 875 gauss. What is often ignored is that the resonant magnetic field corresponding to 13.56 MHz is approximately 4.7 gauss so RF sources, which employ weak magnetic fields, may still exhibit electron cyclotron resonance [32], [33]. Processing is a local process which depends directly on the plasma parameters immediately above the wafer and only indirectly on distant parameters.…”

Section: A Sourcesmentioning

confidence: 99%