A novel optical emission spectroscopy (OES) technique for the determination of electron temperatures and densities in low-pressure argon discharges is compared with Thomson scattering (TS). The emission spectroscopy technique is based on the measurement of certain line ratios in argon and a collisional–radiative model (CRM) including metastable transport. The investigations are carried out in a planar inductively coupled neutral loop discharge (NLD) over a wide range of pressures, p = 0.05 Pa–5 Pa. This discharge is a weakly magnetized novel radio-frequency (rf) plasma source, proposed for plasma etching. The NLD is operated in pure argon at a frequency of f = 13.56 MHz and powers varied between P = 1 kW and 2 kW. Both diagnostics, OES and TS, are applied in parallel. The electron energy distribution functions obtained by TS are clearly Maxwellian at low pressures but exhibit a certain enhancement of the energetic tail at higher pressures. Electron densities and temperatures obtained by both diagnostic techniques are compared. Further, absolute numbers of the metastable densities derived from the measurement by the CRM are compared with earlier measurements under similar conditions. Excellent agreement is found throughout if depletion of the neutral gas density by increasing gas temperature and electron pressure is included in the CRM. Electron pressure is the dominant depletion mechanism at gas pressures p ⩽ 0.1 Pa and rf powers P > 1 kW. There, the electron pressure exceeds more than 3 times the neutral pressure and the ionization degree approaches 7% while at pressures p > 1 Pa the degree of ionization is relatively low (<10−3) and neutral gas depletion is dominated by gas heating.
Neutral gas depletion mechanisms are investigated in a dense low-temperature argon plasma—an inductively coupled magnetic neutral loop (NL) discharge. Gas temperatures are deduced from the Doppler profile of the 772.38 nm line absorbed by argon metastable atoms. Electron density and temperature measurements reveal that at pressures below 0.1 Pa, relatively high degrees of ionization (exceeding 1%) result in electron pressures, pe = kTene, exceeding the neutral gas pressure. In this regime, neutral dynamics has to be taken into account and depletion through comparatively high ionization rates becomes important. This additional depletion mechanism can be spatially separated due to non-uniform electron temperature and density profiles (non-uniform ionization rate), while the gas temperature is rather uniform within the discharge region. Spatial profiles of the depletion of metastable argon atoms in the NL region are observed by laser induced fluorescence spectroscopy. In this region, the depletion of ground state argon atoms is expected to be even more pronounced since in the investigated high electron density regime the ratio of metastable and ground state argon atom densities is governed by the electron temperature, which peaks in the NL region. This neutral gas depletion is attributed to a high ionization rate in the NL zone and fast ion loss through ambipolar diffusion along the magnetic field lines. This is totally different from what is observed at pressures above 10 Pa where the degree of ionization is relatively low (<10−3) and neutral gas depletion is dominated by gas heating.
A planar inductively coupled radio-frequency (rf) magnetic neutral loop discharge has been designed. It provides diagnostic access to both the main plasma production region as well as a remote plane for applications. Three coaxial coils are arranged to generate a specially designed inhomogeneous magnetic field structure with vanishing field along a ring in the discharge—the so-called neutral loop (NL). The plasma is generated by applying an oscillating rf electric field along the NL, induced through a four-turn, planar antenna operated at 13.56 MHz. Electron density and temperature measurements are performed under various parameter variations. Collisionless electron heating in the NL region allows plasma operation at comparatively low pressures, down to 10−2 Pa, with a degree of ionization in the order of several per cent. Conventional plasma operation in inductive mode without applying the magnetic field is less efficient, in particular in the low pressure regime where the plasma cannot be sustained without magnetic fields.
Non-invasive determination of electron energy and velocity distributions in lowtemperature, non-thermal plasmas has always been a great challenge for diagnostics. Thomson scattering has proved to be a very versatile technique and application has been made to lowpressure discharges. In inductively coupled (ICP) radio frequency (RF) discharges the electron velocity distribution function is harmonically modulated in time and this modulation is equivalent to the oscillating current density generated in the plasma by the induced electric field of the antenna. For the first time this oscillation is measured temporally resolved by Thomson scattering [1]. Further, we will introduce a novel phase resolved emission spectroscopic technique that allows absolute measurement of the same quantity by analyzing the modulation of the atomic excitation by electron collisions [1-3]. The experiment is carried out in an ICP (f = 13,56 MHz) with a planar antenna of 10 cm radius in argon at low pressures in the Pa regime. The induced electric field is directed mainly azimuthally and this is also the direction of the oscillation of the anisotropic part of the electron velocity distribution. This part of the velocity distribution function is measured by Thomson scattering with a frequency doubled Nd:YAG laser with a pulse length of 8 ns which determines the temporal resolution. Under the conditions of our experiment, the scattering is incoherent with the scattering parameter α << 1 and a Maxwellian electron velocity distribution results in a Gaussian spectral distribution. The slope on a logarithmic scale gives directly the electron temperature and the integral the electron density. A drift in the direction of the scattering vector leads to a certain displacement of the distribution. Phase resolved measurement of this displacement allows a direct determination of the drift oscillations.
Spatial structures of plasma parameters in a radio-frequency inductively coupled magnetic neutral loop discharge are investigated under various parameter variations using spatially resolved Langmuir probe measurements. A strong coupling between the plasma production region, in the neutral loop (NL) plane, and the axially remote substrate region is observed. The two regions are connected through the separatrices and therefore, spatial profiles in the substrate region are strongly influenced by the plasma production region and the structure of the separatrices. The electron temperature in the plasma production region peaks in the centre of the NL while the maximum in electron density is shifted radially inwards due to diffusion. Details of the structures in both regions, the production region and the substrate region, are determined through the position of the NL and the gradient of the inhomogeneous magnetic field around the NL confinement region. Parameter combinations are found providing higher plasma densities and better uniformity than in common inductively coupled plasmas without applying an additional magnetic field. The uniformity can be further improved using temporal variations of the magnetic field structure.
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