Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators

Hickey, Ryan; Kujath, Marek; Hubbard, Ted

doi:10.1116/1.1468654

Cited by 113 publications

(114 citation statements)

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“…Physical modelling of such devices poses many difficulties, one of the most significant being that the thermal, electrical, and mechanical domains are coupled with one another. Nonetheless, many researchers have produced models of varying complexity [4][5][6][7][8][9][10][11]. In order to accommodate the large spatial variations in properties, the use of finite element analysis (FEA) software packages in such models is common [10], as are highly elaborate analytical models that solve for spatially distributed parameters, resulting in a large number of simultaneous equations [8]- [9].…”

Section: Introductionmentioning

confidence: 99%

Dimensional Analysis of a Hot-arm Actuator

Adams¹

2017

World Congress on Mechanical, Chemical, and Material Engineering

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-In the present work, a dimensional analysis of hot-arm actuation is performed. Several dimensionless pi groups result, including the Biot number; a thermo-electro parameter combining voltage, electrical resistivity, and thermal expansion coefficient; and a number of geometric parameters. The dimensional analysis proves that there is no way to incorporate the dimensions of Young's modulus in the problem, verifying suspicions voiced in a small number of earlier works. Furthermore, the thermo-electro parameter validates the results of many models and experiments in which deflection is directly proportional to both the thermal expansion coefficient and the square of the applied voltage. Lastly, the small Biot numbers (0.001 < Bi < 0.2) encountered in hot arm actuators indicate that a lumped-element approach to thermal modelling is legitimate, and therefore capable of producing accurate results.

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Section: Introductionmentioning

confidence: 99%

Dimensional Analysis of a Hot-arm Actuator

Adams¹

2017

World Congress on Mechanical, Chemical, and Material Engineering

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“…Heat transfers in three modes: conduction, convection, and radiation. However, at micro-scale, conduction dominates the other heat transfer modes (Hickey et al 2002;Yan et al 2004); therefore, only conduction will be considered in the model. Due to symmetrical and identical geometries, all actuation beams units should have identical temperature distributions.…”

Section: Analytical Modelingmentioning

confidence: 99%

Indirectly heated micro-electrothermal actuator with a monolithically integrated displacement sensor

Xie

Lai

2009

Microsyst Technol

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In this article, an indirectly heated micro-electrothermal actuator is presented. The actuator has a capacitive sensor monolithically integrated to provide in vivo sensing of the actuator's displacement. The actuator and sensor are fabricated using the PolyMUMPs process. Electrothermal and thermal-mechanical models of the actuator have been developed. Simulated displacement versus input current reasonably agrees with tested results. The integrated capacitive sensor readout is an indicator for the displacement.

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“…It is necessary to build the thermal models separately because the current densities of the primary and secondary beam are different and the temperature distributions are related to the current densities. Many studies have proven that the heat loss of thermal actuators is primarily caused by thermal conduction through the air gap and the substrate, while the heat loss to free convection and thermal radiation is negligible and could reasonably be ignored [13,14]. Without considering the free convection and thermal radiation, the thermal model of cascaded V-shaped actuators with the secondary beam carrying current can be achieved by optimizing Zhang's macro-model [11].…”

Section: Thermal Modelmentioning

confidence: 99%

Mechanical Performance of a Cascaded V-Shaped Electrothermal Actuator

Shen

Chen

2013

International Journal of Advanced Robotic Systems

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The function and performance of MEMS are affected by the output ability of the displacement and force of microactuators. The lateral deflection of cascaded V-shaped electrothermal actuators is modelled as a triple, statically indeterminate problem. An iteration algorithm is set up to calculate the output displacement and typical forces in anchors. The calculated results of this model agree well with our own simulation results as well as with the experimental and calculated results in the literature, and we conclude that the model is credible. The paper also discusses the effects of the structure parameters and temperature increments on the displacement production ability. Clear differences were found between single and cascaded V-shaped electrothermal actuators. For the former, the maximum deflection takes place in a 0.04 rad beam angle, while for the latter the beam angle is 0.19 rad. For both types of actuators, the deflection is unrelated to the beam thickness. The displacement of the cascaded V-shaped electrothermal actuator is proportional to the temperature increment and beam length, but is inversely proportional to the beam width. Experiments on the output ability of cascaded V-shaped electrothermal actuators validated the calculated and simulation results.

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Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators

Cited by 113 publications

References 1 publication

Dimensional Analysis of a Hot-arm Actuator

Dimensional Analysis of a Hot-arm Actuator

Indirectly heated micro-electrothermal actuator with a monolithically integrated displacement sensor

Mechanical Performance of a Cascaded V-Shaped Electrothermal Actuator

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