Harmonics Analysis of the Electron Component of rf Bulk Plasmas II. Electron Distribution Function and Relevant Macroscopic Quantities in H₂

Abstract

I n a preceding part of the paper, based on the Fourier expansion technique, a new method wirs developed to study the electron kinetics in weakly ionized, spatially uniform bulk plasmas of rf discharges in the established periodic state. Starting from the electron Boltzmann equation the Fourier expansion technique has been applied to the pnrticil differential equation system for t and fA, the isotropic part and the first contribution to the anisotropy of the electron velocity distribution function, where both the distribution parts are the first two coefficients of the Legendre Polynomial expansion of the distribution function. In this part of the piiper the new method will be applied t o investigate thc bchiiviorir of thc electron velocity distribution of the rf bulk plasma in molecular hydrogen and, in uddition, of main mireroscopic quantities.The study of the latter qucintities will be possiblc since these :ire determined by appropriate energy space averaging over f and f.,, rcspcctivcly. Thus, ii comprehcnsive harmonics aniilysis of the electron component of the rf H3 bulk plasmii could be medc in a wide r/ field frequency range.This includes the determination of the hrmonics constributions to the isotropic and anisotropic distribution and to relevant mncroscopic qciirntities ns dependent on the field frequency for thc mentioned wide rf field frequency range as well ns of the phtisc tingles between the different harmonics. It could be proved that the so-called 10-term approximntion is sufficient for the description. Further on the periodic alteration of important mncroscopic quantities, as mean electron energy, power input from the rf field end power loss in collision processes etc., and their period averages will be investigated in this truncation order. The resiilts obtained are disciissed nnd could be especially interpreted within a physical concept based on n eompnrison of the rf field frcqnency with the lumped collision frequency for energy dissipntion and that for impiilse dissipation.