1993
DOI: 10.1007/978-1-4899-1130-8_22
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Collision Dominated Electron Kinetics in Low and High Frequency Fields

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Cited by 10 publications
(8 citation statements)
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“…are, finally, obtained when solving the diffusion equation (18) and the momentum balance (7) with (15). According to relations (21), an exponential spatial decay of the energy flux density j ez and a linear decrease of the mean energy density u m from their respective boundary values are obtained involving the spatially unchanged particle flux density j z (0).…”
Section: Basic Relations Of the Kinetic Treatmentmentioning
confidence: 99%
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“…are, finally, obtained when solving the diffusion equation (18) and the momentum balance (7) with (15). According to relations (21), an exponential spatial decay of the energy flux density j ez and a linear decrease of the mean energy density u m from their respective boundary values are obtained involving the spatially unchanged particle flux density j z (0).…”
Section: Basic Relations Of the Kinetic Treatmentmentioning
confidence: 99%
“…In the active region of various discharge plasmas, for instance in glow, radiofrequency, microwave or surface wave discharges, the primary activation of the neutral gas particles usually takes place by their binary collisions with the energetic electron gas. Because of the poor thermal contact of the electrons with the heavy gas particles, a non-equilibrium kinetics of the electron gas results and the primary activation of the heavy particles occurs, as a rule, under pronounced non-equilibrium conditions [7][8][9][10][11][12][13][14][15][16]. As a consequence, the macroscopic properties of the electron gas, particularly their transport and dissipation coefficients and the different rate coefficients of inelastic collisions cannot be found by applying a hydrodynamic description of the electrons.…”
Section: Introductionmentioning
confidence: 99%
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“…The prior pdf P (f|I ) entering equation (6) has to quantify all the information we have about the EEDF. The distribution has to be positive and additive in the sense that by connecting two energy cells the number of electrons in the joint cell is the sum over the subcells.…”
Section: Priorsmentioning
confidence: 99%
“…The notation of temperatures for the various parts of the EEDF is often a poor approximation for describing the whole EEDF [2]. Theoretically determined EEDFs solving the Boltzmann equation can be found in [3][4][5][6][7][8][9] and experimentally determined EEDFs can be found in [7,8,10].…”
Section: Introductionmentioning
confidence: 99%