2002
DOI: 10.1143/jjap.41.7301
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Hardening Effect of GaP1-xNxand GaAs1-xNxAlloys by Adding Nitrogen Atoms

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Cited by 34 publications
(20 citation statements)
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“…The crystalline quality and the nitrogen composition were evaluated by high-resolution X-ray diffraction (XRD) measurement with (004) symmetrical and (115) asymmetrical diffractions [7].…”
Section: Introductionmentioning
confidence: 99%
“…The crystalline quality and the nitrogen composition were evaluated by high-resolution X-ray diffraction (XRD) measurement with (004) symmetrical and (115) asymmetrical diffractions [7].…”
Section: Introductionmentioning
confidence: 99%
“…The critical thickness of 2.3% and 3.8%-N films calculated using the Matthews and Blakeslee model [4] is 34 and 18 nm, respectively. The layer thickness of two films are beyond the calculated values, however, the strain factor is still 1, which may be contributed by other mechanisms such as the pinning effect of the dislocation at the impurities as carbon [5] and the hardening effect [6], or in XRD measurement the signal from the strained parts in the GaPN layer will be stronger than the relaxed parts, and as a result the layer may seem to be completely strained from the XRD results. Fig.…”
Section: Article In Pressmentioning
confidence: 72%
“…The experimental critical thickness of the GaPN epitaxial layer grown on Si and GaP substrates was larger than the theoretical critical thickness. This effect is caused by the dislocation pinning effect by N atoms [29]. From this tendency, for example, the critical thickness of a GaP 0.99 N 0.01 layer on the Si substrate is estimated to be 300 nm at least.…”
Section: Resultsmentioning
confidence: 99%