1998
DOI: 10.1109/68.730467
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Half-symmetric cavity tunable microelectromechanical VCSEL with single spatial mode

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Cited by 70 publications
(30 citation statements)
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“…Although little previous work has focused specifically on MEMS-tunable VCSOAs (MT-VCSOAs), a number of research groups have developed a variety of other MEMS-tunable vertical-cavity devices, including VCSELs [7], [8], [13]- [15], resonant-cavity light-emitting diodes (RCLEDs) [16], asymmetric FP modulators [17], and vertical-cavity filters [18]. The majority of these structures have utilized electrostatic tuning, although thermal tuning is also frequently used [7].…”
Section: Introductionmentioning
confidence: 99%
“…Although little previous work has focused specifically on MEMS-tunable VCSOAs (MT-VCSOAs), a number of research groups have developed a variety of other MEMS-tunable vertical-cavity devices, including VCSELs [7], [8], [13]- [15], resonant-cavity light-emitting diodes (RCLEDs) [16], asymmetric FP modulators [17], and vertical-cavity filters [18]. The majority of these structures have utilized electrostatic tuning, although thermal tuning is also frequently used [7].…”
Section: Introductionmentioning
confidence: 99%
“…The small-mode-volume cavity considered here provides the bandwidth necessary to accommodate the short optical pulses and additionally offers a large optomechanical coupling rate. One technical challenge associated with these microcavities is fabrication with sufficient tolerance to achieve the desired optical resonance (under the assumption of a limited range of working wavelength), however this can be overcome by incorporating electrically controlled tunability of the cavity length (50,52,53). For a mechanical resonator with eigenfrequency ω M ∕2π ¼ 500 kHz and effective mass m ¼ 10 ng, the mechanical groundstate size is x 0 ¼ ffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi ℏ∕mω M p ≃ 1.8 fm and optomechanical coupling proceeds at g 0 ∕2π ¼ ω c ðx 0 ∕ ffiffi ffi 2 p LÞ∕2π ≃ 86 kHz, where ω c is the mean cavity frequency and L is the mean cavity length.…”
Section: Experimental Feasibilitymentioning
confidence: 99%
“…Promising research into wavelength-tunable VCSEL's is currently being conducted by researchers at Stanford University 4 -8 as well as others. 19,20 The Stanford researchers are producing VCSEL's that include a deformable membrane as the top mirror of the laser cavity. This membrane can be adjusted continuously with electrostatic charge, which adjusts the dimensions of the laser cavity.…”
Section: A Wavelength-tunable Vertical-cavity Surface-emitting Lasersmentioning
confidence: 99%