Gyroscopes

This work presents in-plane and out-of-plane Coriolis rate gyroscopes based on nano-scale piezoresistive readout and using an eutectic bonding between the bottom wafer, where the sensor is formed, and the cap wafer, where routing and metal pads are fabricated. The gyroscopes feature a novel design with a central levered sense frame, to maximize the device symmetry and compactness. The position of the piezoresistive nanogauges along the lever system optimizes the scale-factor. Operation on a ± 3000 dps full-scale-range (FSR) demonstrates quite competitive performance, with a linearity error lower than 0.25% and a cross-axis rejection 50x better than state-of-the art consumer gyroscopes.

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“…to common findings, see e.g. [9]) are compensated both through electromechanical quadrature nulling electrodes and by in-phase demodulation.…”

Section: Resultsmentioning

confidence: 84%

Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors

Dellea

Giacci

Longoni

et al. 2015

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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“…4e is a detail of the NEMS gauges positioned along the lever system close to the rotational hinge. Assuming a controlled drive motion amplitude (as described in the following of this work), the lever tip displacement y as a function of the angular rate variation can be written as [2]:…”

Section: Z-axis Device Designmentioning

confidence: 99%

“…The rate noise density S ,tm , considering only the mechanical noise of the sense frame S y , and assuming a constant transfer function Q eff /k s between sense frame force and displacement (Q ef f being the gain at a distance f from resonance, and k s being the sense frame stiffness), turns out to be [2]:…”

Section: Z-axis Device Designmentioning

confidence: 99%

In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

Dellea

Giacci

Longoni

et al. 2015

J. Microelectromech. Syst.

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This paper presents a new design and a complete characterization of amplitude-modulation gyroscopes based on piezoresistive nanogauges. The working principle and optimization criteria of in-plane and out-of-plane devices relying on double frame decoupling and levered sense mode are discussed in light of sensitivity and resolution theoretical predictions. The architecture of driving and sensing electronics is also presented. The reduced thermo-mechanical damping with respect to capacitive configurations, and the inherently high output signal leads to white noise performance in the mdps/ √ Hz range within an area smaller than 0.35 mm 2 , at pressures in the millibar range. Sub-5-ppm linearity errors within 1000 dps are also demonstrated.[2015-0064]

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“…The gyroscope is operated in conventional amplitude-modulation (AM), Coriolis rate, mode-split configuration [7][8][9]. It features drive-mode comb fingers, NEMS gauges for piezoresistive sensing, and electrodes for tuning and quadrature compensation purposes.…”

Section: Device Descriptionmentioning

confidence: 99%

“…The Allan variance method is commonly used to describe the noise and long-term stability of MEMS gyroscopes [5,[7][8][9][10]. It indeed gives a synthetic representation of the different noise contributions of the system, that become visible as a function of the observation time intervals.…”

Section: Fig 6: Gyroscope Output Acquired During a Frequency Sweep Fmentioning

confidence: 99%

Vibrations rejection in gyroscopes based on piezoresistive nanogauges

Giacci

Dellea

Longoni

et al. 2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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The work discusses the effects of vibrations on the performance of rate gyroscopes in terms of Allan variance, and presents the results of vibrations rejection on a Z-axis gyroscope based on piezoresistive nano-gauge sensing elements. In a comparative analysis with a consumer offthe-shelf gyroscope, the proposed device shows a 10-fold better angle random walk (ARW) under no vibrations, and at least a 100-fold better Allan variance, when acquired under vibration amplitude of ±6 g (gravity units), at frequencies up to 10 kHz.

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Gyroscopes

Cited by 15 publications

References 0 publications

Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors

Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors

In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

Vibrations rejection in gyroscopes based on piezoresistive nanogauges

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