We have proposed and fabricated a poly-Si TFT integrated gatedata line-crossover structure in order to increase the aperture ratio and to reduce the signal delay. The poly-Si TFT is integrated in the gate-data line-crossover without sacrificing the electrical characteristics so that the aperture ratio of the panel was improved by about 3% because the TFT is located under a metal line. We employ a low dielectric air-gap between the gate-data line crossover, which reduces the capacitance between the gate and the data lines, so that the signal delay of the data line is decreased significantly. The fabricated TFT was successfully operated, and the proposed structure reduces the delay time by about 9 times compared with the conventional panel that does not employ any air-bridges.
IntroductionPoly-Si TFTs (Polycrystalline Silicon Thin Film Transistors) have attracted considerable attentions for high-resolution AMLCD due to a high mobility and a current driving capability [1]. As the pixel size becomes small, an aperture ratio decreases because TFT size and line width may not be decreased. It is desirable to design a small size pixel for poly-Si TFT-LCD with a high aperture ratio. The signal delay of data-lines in a large high-resolution AMLCD panel may be also a critical problem and it may be increased with panel size [2].The purpose of our work is to propose a new TFT which integrates a TFT at a gate-data line-crossover in order to improve the aperture ratio of the panel [3]. We also employ a low dielectric air-gap in the gate-data line crossover [4], which reduces the capacitance between the gate and the data lines so that the signal delay of the data line is decreased significantly. The new panel is successfully fabricated by locating the TFT under the data line. An air-gap between the data line bridge and the TFT below the data line were successfully formed by a sacrificial photoresist layer.
Structure & Fabrication 2.1 Proposed Panel StructureIn the proposed line-crossover structure, we located top-gate polyTFTs in the gate-data line-crossovers. The layouts of the proposed pixel and the conventional one are shown in Fig. 1. In the proposed pixel structure, an active area is located at the bottom of the data line and the data lines cover TFTs completely. TFTs in the proposed panel are integrated between the metal lines so that the aperture ratio of the panel was improved by the size of TFTs. It should be noted that TFTs are not optically transparent. In comparison with the conventional panel, TFTs based on the proposed panel are integrated between the metal lines so that the aperture ratio of the panel is improved by approximately 3% per whole pixel area. The relative aperture-ratio improvement is larger as the panel resolution is higher because the high-resolution panel has a low aperture-ratio. For example, the aperture-ratio of SXGA panel (1280×1024 pixels) is only 33% while that of SVGA panel (800×600 pixels) is 65%. So the relative apertureratio improvement is about 10% in the case of SXGA or higher resolution...