Growth processes of nanocrystalline diamond films in microwave cavity and distributed antenna array systems: A comparative study

Baudrillart, Benoît; Nave, A S C; Hamann, S.; Bénédic, F.; Lombardi, G.; Helden, J. H. van; Röpcke, J.; Achard, Jocelyn

doi:10.1016/j.diamond.2016.11.018

Cited by 12 publications

(8 citation statements)

References 54 publications

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“…Since the accurateness of the thickness measurement was estimated at ±10%, the growth rate remains roughly constant as a function of the deposition time. Samples of series S grown during 2 h have a growth rate, and, therefore, a film thickness, which increase when the substrate temperature varies from 265 to 400 • C. This behavior is comparable to the one reported for the DAA microwave system when using conventional substrates such as silicon in similar growth conditions [39]. The growth rate thus increases from 39.5 nm•h −1 to 55 nm•h −1 leading to a thickness variation from 79 to 110 nm.…”

Section: Resultssupporting

confidence: 79%

Synthesis of High Quality Transparent Nanocrystalline Diamond Films on Glass Substrates Using a Distributed Antenna Array Microwave System

et al. 2022

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Diamond is a material of choice for the fabrication of optical windows and for protective and anti-reflecting coatings for optical materials. For these kinds of applications, the diamond coating must have a high purity and a low surface roughness to guarantee a high transparency. It should also be synthesized at low surface temperature to allow the deposition on low melting-point substrates such as glasses. In this work, the ability of a Distributed Antenna Array (DAA) microwave system operating at low temperature and low pressure in H2/CH4/CO2 gas mixture to synthesize nanocrystalline diamond (NCD) films on borosilicate and soda-lime glass substrates is investigated aiming at optical applications. The influence of the substrate temperature and deposition time on the film microstructure and optical properties is examined. The best film properties are obtained for a substrate temperature below 300 °C. In these conditions, the growth rate is around 50 nm·h−1 and the films are homogeneous and formed of spherical aggregates composed of nanocrystalline diamond grains of 12 nm in size. The resulting surface roughness is then very low, typically below 10 nm, and the diamond fraction is higher than 80%. This leads to a high transmittance of the NCD/glass systems, above 75%, and to a low absorption coefficient of the NCD film below 103 cm−1 in the visible range. The resulting optical band gap is estimated at 3.55 eV. The wettability of the surface evolves from a hydrophilic regime on the bare glass substrates to a more hydrophobic regime after NCD deposition, as assessed by the increase of the measured contact angle from less than 55° to 76° after the deposition of 100 nm thick NCD film. This study emphasizes that such transparent diamond films deposited at low surface temperature on glass substrate using the DAA microwave technology can find applications for optical devices.

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Section: Resultssupporting

confidence: 79%

Synthesis of High Quality Transparent Nanocrystalline Diamond Films on Glass Substrates Using a Distributed Antenna Array Microwave System

et al. 2022

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“…The total current density J is the sum of the displacement current density J d and the plasma current density J p . The latter can be approximated in the microwave time scale by the electron current density J p = −en e v e (6) neglecting the slow motion of ions. Here, e, n e and v e denote the charge, density and mean velocity of electrons, respectively.…”

Section: Static Magnetic and Microwave Fieldsmentioning

confidence: 99%

“…Low pressure hydrogen plasmas are of great interest to a plethora of industrial sectors including multiple stages of semiconductor fabrication [1][2][3][4], diamond-like carbon film manufacturing [5,6], and for their usage as a hydrogen radical source [7]. Equally, the interaction between a hydrogen plasma and a surface is of prominent importance in a number of academic research fields such as negative ion generation for neutral beam injection [8][9][10] and ammonia synthesis [11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance

Sigeneger

Ellis

Harhausen

et al. 2022

Plasma Sources Sci. Technol.

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A self-consistent fluid model has been successfully developed and employed to model an electron cyclotron resonance driven hydrogen plasma at low pressure. This model has enabled key insights to be made on the mutual interaction of microwave propagation, power density, plasma generation, and species transport at conditions where the critical plasma density is exceeded. The model has been verified by two experimental methods. Good agreement with the ion current density and floating potential - as measured by a retarding energy field analyzer - and excellent agreement with the atomic hydrogen density - as measured by two-photon absorption laser induced fluorescence - enables a high level of confidence in the validity of the simulation.

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“…Surface-wave plasma CVD using microwaves has been suggested as an alternative to solve the abovementioned problem since it is comparatively easier to form a large-area film [21]. The development of an advanced CVD method for large-area diamond synthesis has, however, been challenging [22,23]. Although considerable research on the synthesis of large-area diamonds has been conducted, diamond crystallinity and deposition rate still require improvement.…”

Section: Introductionmentioning

confidence: 99%

Scanning Deposition Method for Large-Area Diamond Film Synthesis Using Multiple Microwave Plasma Sources

et al. 2022

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The demand for synthetic diamonds and research on their use in next-generation semiconductor devices have recently increased. Microwave plasma chemical vapor deposition (MPCVD) is considered one of the most promising techniques for the mass production of large-sized and high-quality single-, micro- and nanocrystalline diamond films. Although the low-pressure resonant cavity MPCVD method can synthesize high-quality diamonds, improvements are needed in terms of the resulting area. In this study, a large-area diamond synthesis method was developed by arranging several point plasma sources capable of processing a small area and scanning a wafer. A unit combination of three plasma sources afforded a diamond film thickness uniformity of ±6.25% at a wafer width of 70 mm with a power of 700 W for each plasma source. Even distribution of the diamond grains in a size range of 0.1–1 μm on the thin-film surface was verified using field-emission scanning electron microscopy. Therefore, the proposed novel diamond synthesis method can be theoretically expanded to achieve large-area films.

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Growth processes of nanocrystalline diamond films in microwave cavity and distributed antenna array systems: A comparative study

Cited by 12 publications

References 54 publications

Synthesis of High Quality Transparent Nanocrystalline Diamond Films on Glass Substrates Using a Distributed Antenna Array Microwave System

Synthesis of High Quality Transparent Nanocrystalline Diamond Films on Glass Substrates Using a Distributed Antenna Array Microwave System

Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance

Scanning Deposition Method for Large-Area Diamond Film Synthesis Using Multiple Microwave Plasma Sources

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