Growth of ZnO by MOCVD using alkylzinc alkoxides as single-source precursors

Abstract

Thin films of ZnO have been grown by low-pressure MOCVD using methylzinc isopropoxide, MeZn(OPi), and methylzinc tert-butoxide, MeZn(OBu*), in the absence of an added oxygen source. The films were grown on to glass substrates in the temperature range 250-400 "C with growth rates of between 0.2 and 4.4 pm h-'.

Chemical Vapor Synthesis of Size‐Selected Zinc Oxide Nanoparticles

“…The results obtained from the SSS route are also in good agreement with MOCVD and solvothermal experiments using this precursor, in which the exclusive formation of ZnO was also found. [40] Apparently, the precursor enables a second, yet not recognized, decomposition mechanism that results in the formation of elemental zinc. To address such a scenario in more detail, mass spectrometric studies were performed on the heterocubane.…”

Consecutive fragmentations of the cubane-like zinc cluster [CH3Zn(O-i-C3H7)]4upon electron ionization

“…[12][13][14] Here, we report a mass-spectrometric investigation of tetrameric methylzinc iso-propoxide [CH 3 Zn(O-i-C 3 H 7 )] 4 , a compound with a cubic Zn 4 O 4 skeleton which has already proven useful in chemical vapor deposition of zinc materials. 15,16 A key question in the fragmentation of transition-metal alkoxides (except methoxides) is whether the decomposition occurs via b-hydrogen transfer to afford the corresponding carbonyl compound and a metal hydride (route a in Scheme 1, where an iso-propoxide is used as example), or migration of a g-hydrogen atom leads to the formation of a metal hydroxide and an alkene (route b). Both types of reaction are known for gaseous ions from earlier mass spectrometric studies of transition-metal alkoxides.…”

Aerosol assisted chemical vapour deposition of transparent conductive aluminum-doped zinc oxide thin films from a zinc triflate precursor

“…These issues drive research into other precursor systems including synthesised compounds, such as alkyl zinc alkoxides [24] and zinc β-iminoesterates [25]. Other commercially available compounds including zinc acetate [26] and zinc acetylacetonate [27] have been investigated, but their use has been limited by unfavourable thermal properties [28].…”