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1993
DOI: 10.1016/0040-6090(93)90172-l
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Growth of titanium dioxide thin films by atomic layer epitaxy

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Cited by 309 publications
(258 citation statements)
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“…The value 3.6 g/cm 3 obtained for the present pure TiO2 thin film approaches the density of bulk anatase 29 3.84 g/cm 3 . This is in line with the previously reported values 3.39-3.76 g/cm 3 for ALD-fabricated TiO2 films 30 and is in agreement with our XRD data that confirmed growth of anatase phase TiO2. The value 1.6 g/cm 3 for the m=0 hybrid indicates a dramatic decrease in density compared to the purely inorganic films and compares well with the values of around 1.5-2.0 g/cm 3 reported previously for similar types of hybrid films 14,20,21,27 .…”
Section: Resultssupporting
confidence: 94%
“…The value 3.6 g/cm 3 obtained for the present pure TiO2 thin film approaches the density of bulk anatase 29 3.84 g/cm 3 . This is in line with the previously reported values 3.39-3.76 g/cm 3 for ALD-fabricated TiO2 films 30 and is in agreement with our XRD data that confirmed growth of anatase phase TiO2. The value 1.6 g/cm 3 for the m=0 hybrid indicates a dramatic decrease in density compared to the purely inorganic films and compares well with the values of around 1.5-2.0 g/cm 3 reported previously for similar types of hybrid films 14,20,21,27 .…”
Section: Resultssupporting
confidence: 94%
“…We measured an average growth rate of 0.49 Å per ALD cycle (<0.5 monolayers per cycle), which is consistent with previously reported values. 40,41 The same growth rate was measured by TEM for TiO 2 shells grown on ZnO nanowires. TiO 2 films thinner than about 5 nm were completely amorphous and very smooth (Supporting Information, Figure 1).…”
Section: Resultsmentioning
confidence: 81%
“…2011, 1, 10-33 deposition, [ 133 , 134 ] pulsed laser deposition, [ 135 ] chemical vapor deposition [ 136 ] and atomic layer deposition. [ 137 ] During electrochemical lithiation, around 1.8 V, the anatase Li x TiO 2 structure can be intercalated up to x = 0.5, which results in a theoretical gravimetric charge density of 168 mAh ⋅ g − 1 , which is equivalent to a volumetric capacity of 660 mAh ⋅ cm − 3 , considering an anatase unit cell (Ti 4 O 8 ) of 135 Å 3 . [ 138 ] Another lithium electrode based on titanium is Li 4 Ti 5 O 12 .…”
Section: Lithium Lanthanum Titanium Oxides (Llto)mentioning
confidence: 99%