TiO2:C superlattices are fabricated from atomic/molecular layer deposited (ALD/MLD) inorganic-organic [(TiO2)m(Ti-O-C6H4-O-)k=1]n thin films via a post-deposition annealing treatment that converts the as-deposited monomolecular organic layers into sub-nanometerthick graphitic interface layers confined within the TiO2 matrix. The internal graphitic layers act as effective phonon-scattering boundaries that bring about a ten-fold reduction in thermal conductivity of the films with decreasing superlattice period down to an ultra-low value of 0.66±0.04 Wm -1 K -1 -a finding that makes inorganic-C superlattices fabricated with the present method as promising structures for e.g. high-temperature thermal barriers and thermoelectrics.
IntroductionMaterials with ultra-low thermal conductivity are needed, e.g., for thermal-barrier and thermoelectric applications; the latter application calls for novel heavily-doped semiconductors able to combine thermal insulation with high electronic conductivity and thermopower. General pathways to suppress thermal transport in fully-dense solid materials exploit the introduction of structural disorder in the form of, e.g., point defects, alloying components, amorphous phases, grain boundaries or material interfaces. Both experiments and theory have shown that the introduction of material interfaces is particularly well harnessed in various superlattice and multilayer thin-film materials where the interfaces between alternating layers of dissimilar materials act as phonon-scattering boundaries: not only may thermal conductivity be suppressed by an order of magnitude across the film plane 1-2 but a significant drop may also be seen in the inplane direction. [3][4] Furthermore, careful balancing between order and disorder in multilayers may enable achieving ultralow thermal conductivities comparable to or even lower than those of amorphous or porous materials, as evidenced by the results for, e.g., W/Al2O3 nanolaminates (~0.6 Wm -1 K -1 ) and layered WSe2 crystals (~0.05 Wm -1 K -1 ). [5][6][7] For small-period superlattices the dominance of the phononboundary scattering at the internal interfaces over the scattering by the bulk of the constituent materials enables the control of thermal conductivity through careful adjustment of the superlattice period; 8 efficient suppression is achieved for incoherent phonons by decreasing the period, until potentially, phonon coherence may yield an upturn for periods similar to (and smaller than) phonon mean free path. 9-10 However, control over thermal conductivity in layered materials is not limited to simple size effects, as in particular for inorganic-organic materials, the drastic mismatch of the vibrational properties and the control over the bond strength over the internal interfaces may allow for further suppression of phonon transport. [11][12] Regarding inorganic-organic materials, use of organic layers of proper thicknesses could also allow for exploitation of phonon filtering realized due to interference effects within the organic layer. 13...