“…This data corroborated that the oxide films have the elemental composition corresponding to the stoichiometry of the most stable oxides of Ti and Zr, i.e. TiO 2 and ZrO 2 , respectively [39,40,43,44]. No presence of substoichiometric oxides was observed; Ti or Zr was present in the films only as oxidized species in their maximum valence state, Ti 4+ at ≈458.8 eV and Zr 4+ at ≈184.6 eV, respectively.…”