We have proposed a new model for the Sb-stabilized InSbO 1 l)#-(2x2) reconstructed surface prepared by molecular-beam epitaxy. Adsorption of Sb trimers at a fourfold atop site of the outermost Sb layers is confirmed by intensity analysis of transmission-electron-diffraction patterns obtained from the reconstructed surface. Also, Auger electron spectroscopy measurements provided a satisfactory surface composition for the InSbG 1 l)Z?-(2x2) surface. PACS numbers: 68.35.Bs, 61.16.Di, 68.55.Bd The (11 0/4 and (111)2? polar surfaces of III-V compound semiconductors exhibit a considerable number of reconstructions, depending on temperature and surface compositions. In order to obtain details on the surface reconstructions and the related surface phase transitions, first the atomic structures of both polar surfaces have to be determined. Recently, for the (110,4 surface of GaAs, Tong, Xu, and Mei [1] proposed the vacancy buckling model which has been widely accepted because the structure has been confirmed by a variety of investigations: diffraction experiments [1,2], theoretical calculations [3,4], and scanning tunneling microscopy (STM) [5]. On the other hand, for the (11 l)Z? surface a similar (2x2) structure has been observed on the molecularbeam-epitaxy-(MBE-) grown surface under group-Velement stabilized conditions. However, no well-established model for the (111)/? surface has been reported. For example, although for the GaAsG 1 0/?-(2x2) structure total energy calculations led to a multivacancy model [6] and a staggered As vacancy model [7], both failed in low-energy electron-diffraction (LEED) tests [8].We use transmission electron diffraction (TED) in a structure analysis for the (111)/? surface of InSb. The reason is that information obtained by this method can be interpreted by kinematical approximation under a given diffraction condition, similar to general x-ray diffraction [9,10]. While other electron-diffraction methods, such as LEED and reflection high-energy electron diffraction (RHEED), are useful for surveying surface symmetry, in their interpretations dynamical scattering effects always have to be taken into account. TED can be also complementary to STM, which gives information on the top layer of a surface.In this paper, we present the first quantitative TED analysis of the InSbO 1 0/?-(2x2) surface structure and propose a structural model which explains other experimental and theoretical works.Experiments were performed with a modified JEM-7A transmission electron microscope (100 kV). A detailed description of the experimental apparatus was presented in our earlier papers [11,12]. The ultimate pressure in the specimen chamber was less than 5xl0~1 0 Torr and the pressure during evaporation was below 2x 10~9 Torr. Samples of (110,4-and (110/?-oriented InSb (nondoped) were chemically etched with a mixture of HNO3 and lactic acid (1:10) to form a round hole about 0.1 mm diameter with electron-transparent peripheries. The native oxide was removed from both types of substrate surfaces by heating at ...