Growth of multi-layered graphene on molybdenum catalyst by solid phase reaction with amorphous carbon

Ricciardella, Filiberto; Vollebregt, Sten; Kurganova, E. V.; Giesbers, A. J. M.; Ahmadi, Majid; Sarro, P.M.

doi:10.1088/2053-1583/ab1518

Cited by 5 publications

(5 citation statements)

References 38 publications

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“…The average ratio I(D)/I(G) indicates the presence of some defects in the material [43,46,47,49,50]. In this letter, we mostly showed the power of the transfer-free process.…”

Section: Resultsmentioning

confidence: 74%

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Wafer-scale transfer-free process of multi-layered graphene grown by chemical vapor deposition

Ricciardella

Vollebregt

Boshuizen

et al. 2020

Mater. Res. Express

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Chemical vapour deposition (CVD) has emerged as the dominant technique to combine high quality with large scale production of graphene. The key challenge for CVD graphene remains the transfer of the film from the growth substrate to the target substrate while preserving the quality of the material. Avoiding the transfer process of single or multi-layered graphene (SLG-MLG) has recently garnered much more interest. Here we report an original method to obtain a 4-inch wafer fully covered by MLG without any transfer step from the growth substrate. We prove that the MLG is completely released on the oxidized silicon wafer. A hydrogen peroxide solution is used to etch the molybdenum layer, used as a catalyst for the MLG growth via CVD. X-ray photoelectron spectroscopy proves that the layer of Mo is etched away and no residues of Mo are trapped beneath MLG. Terahertz transmission near-field imaging as well as Raman spectroscopy and atomic force microscopy show the homogeneity of the MLG film on the entire wafer after the Mo layer etch. These results mark a significant step forward for numerous applications of SLG-MLG on wafer scale, ranging from micro/nano-fabrication to solar cells technology.

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“…The average ratio I(D)/I(G) indicates the presence of some defects in the material [43,46,47,49,50]. In this letter, we mostly showed the power of the transfer-free process.…”

Section: Resultsmentioning

confidence: 74%

“…As catalyst metal, we used a molybdenum (Mo) film, a CMOS compatible metal, in order to overcome the disadvantages presented by copper [47]. Once the sacrificial Mo layer was etched, the terahertz transmission near-field imaging (TNFI) showed that the MLG film thoroughly lies on the oxidized silicon wafer (SiO 2 /Si).…”

Section: Introductionmentioning

confidence: 99%

Wafer-scale transfer-free process of multi-layered graphene grown by chemical vapor deposition

Ricciardella

Vollebregt

Boshuizen

et al. 2020

Mater. Res. Express

Self Cite

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“…Mo is chosen as a catalyst layer due to the possibility of growing thin and uniform layers of graphene because of its extremely low carbon solubility, thus creating a self-limiting growth process 55 . Moreover, the thermal expansion coefficient (CTE) of Mo in comparison with Cu and Ni is much closer to the one of Si, hence, Mo is less prone to wrinkle creation during high temperature graphene growth 56 , 57 . Additionally, catalyst residues are an important concern in an implantable device.…”

Section: Discussionmentioning

confidence: 99%

Multilayer CVD graphene electrodes using a transfer-free process for the next generation of optically transparent and MRI-compatible neural interfaces

et al. 2022

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Multimodal platforms combining electrical neural recording and stimulation, optogenetics, optical imaging, and magnetic resonance (MRI) imaging are emerging as a promising platform to enhance the depth of characterization in neuroscientific research. Electrically conductive, optically transparent, and MRI-compatible electrodes can optimally combine all modalities. Graphene as a suitable electrode candidate material can be grown via chemical vapor deposition (CVD) processes and sandwiched between transparent biocompatible polymers. However, due to the high graphene growth temperature (≥ 900 °C) and the presence of polymers, fabrication is commonly based on a manual transfer process of pre-grown graphene sheets, which causes reliability issues. In this paper, we present CVD-based multilayer graphene electrodes fabricated using a wafer-scale transfer-free process for use in optically transparent and MRI-compatible neural interfaces. Our fabricated electrodes feature very low impedances which are comparable to those of noble metal electrodes of the same size and geometry. They also exhibit the highest charge storage capacity (CSC) reported to date among all previously fabricated CVD graphene electrodes. Our graphene electrodes did not reveal any photo-induced artifact during 10-Hz light pulse illumination. Additionally, we show here, for the first time, that CVD graphene electrodes do not cause any image artifact in a 3T MRI scanner. These results demonstrate that multilayer graphene electrodes are excellent candidates for the next generation of neural interfaces and can substitute the standard conventional metal electrodes. Our fabricated graphene electrodes enable multimodal neural recording, electrical and optogenetic stimulation, while allowing for optical imaging, as well as, artifact-free MRI studies.

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“…This method refers to preparing materials by using solid-state reactions [88] . In the solid-state reactions for forming amorphous catalysts, the spread and assembly of atoms or molecules can be realized by solid-phase diffusion or physically excited diffusion and aggregation.…”

Section: Solid Phase Methodsmentioning

confidence: 99%

Research progress of amorphous catalysts in the field of electrocatalysis

Yu,

Sun,

Zhang

et al. 2024

Microstructures

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Amorphous materials feature unique structures and physicochemical properties, resulting in their synthesis and applications becoming a dynamic and fascinating new research direction. The high specific surface area, abundant active sites, and good electron transport properties endow amorphous materials with excellent electrocatalytic properties, thus appealing to increasing attention. Based on this, the summary of the current research status of amorphous catalysts in the field of electrocatalysis is urgent and important. In this review, the research progress of amorphous catalysts in electrocatalysis is systematically introduced, focusing on the classification, synthesis methods, modification strategies, characterizations, and electrocatalytic application (including hydrogen evolution reaction, oxygen evolution reaction, oxygen reduction reaction, carbon dioxide reduction reaction, and nitrogen reduction reaction). Finally, this review proposes the prospects and challenges for the future development of high-active and high-selectivity amorphous electrocatalysts.

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Growth of multi-layered graphene on molybdenum catalyst by solid phase reaction with amorphous carbon

Cited by 5 publications

References 38 publications

Wafer-scale transfer-free process of multi-layered graphene grown by chemical vapor deposition

Wafer-scale transfer-free process of multi-layered graphene grown by chemical vapor deposition

Multilayer CVD graphene electrodes using a transfer-free process for the next generation of optically transparent and MRI-compatible neural interfaces

Research progress of amorphous catalysts in the field of electrocatalysis

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