EUV pellicles are needed to support EUV lithography in high volume manufacturing. We demonstrate progress in cap layer design for increased EUV transmission and infrared emission of the Polysilicon-film. In our research lab we obtained EUV transmission of 90% and good emissivity for a fully capped pSi film. We also discuss results on next generation EUV pellicle films. These include metal-silicides and graphite. Next-gen film performance is compared to the current generation pSi film. These films are expected to be stable at higher operating temperature than pSi. Metal-silicides have the advantage of sharing a similar process flow as that of pSi, while graphite shows ultimate high temperature performance at the expense of a more complicated manufacturing flow. Capping layers are needed here as well and capping strategies are discussed for these film generations.
Crystals of (ET) 2 Mn[N(CN) 2 ] 3 (1) and (ET) 2 CuMn[N(CN) 2 ] 4 (2) with mono-and first bimetal dicyanamide anions were obtained and their structure, conducting and magnetic properties were investigated. The structure of 2 is not typical for ET radical cation salts and is characterized by the presence of a 3D polymeric anion built into the ET radical cation layers. The crystals of 1 exhibit a semiconducting behavior of conductivity and 2 undergoes a semiconductor I-semiconductor II phase transition at 295-291 K, which is specified by a jump of resistivity and the appearance of a hysteresis in the R(T) curves. The phase transition is accompanied by changes in the charge state of the ET molecules and intermolecular interactions in the crystal. Antiferromagnetic correlations of spins associated with anionic subsystems were found in both salts at temperatures lower than 25 K. Antiferromagnetic ordering in 1 has a long-range character. The effect of the spin frustrated state of localized spins on conducting electrons of ET subsystem was found in 1.
We developed a new approach to evaluation of the intensity of osteogenic differentiation of mesenchymal stromal stem cells based on measurement of optical density of mesenchymal stromal cell cultures in a concentration range 625-10,000 cells per well after their culturing in osteogenic induction medium and staining of calcium deposits by the method of von Kossa. The proposed method allows comparative semiquantitative evaluation of osteogenic properties of mesenchymal stem cells depending on tissue sources (bone marrow, adipose tissue, placenta), in vitro cell density, number of passages, duration of culturing, and concentration of serum growth factors in the microenvironment. The developed approach makes it possible to compare functional activity of mesenchymal stromal cells in various pathologies. The proposed method can be used in traumatology and orthopedics for improving the efficiency of transplantation of mesenchymal stromal cells for stimulation of reparative osteogenesis.
Single crystals of 1 isopropyl 3,3,5´,6´ tetramethylspiro[indoline 2,2´ 2H pyrano[3,2 b] pyridinium] tris(oxalato)chromate(III) (Sp) 3 Cr(C 2 O 4 ) 3 were prepared for the first time. The mo lecular and crystal structure of this salt was studied by X ray diffraction. The crystal structure of the salt consists of the structural units [3(Sp) + ...Cr(C 2 O 4 ) 33-], in which the charged pyranopyri dinium moieties of the photochromic cations (Sp) + are directed toward the oxalate groups, whereas the indoline moieties are directed into the cavities between the structural units. This structure appeared to be favorable for photochromic transformations in the crystals. Under UV irradiation of the (Sp) 3 Cr(C 2 O 4 ) 3 salt, the thermally stable closed form of spiropyran (λ max = 370 nm) is transformed into the open form (λ max = 574 and 603 nm). The reverse cyclization proceeds slowly in the dark (k = 1.0(2)•10 -5 s -1 ) and rapidly under visible light irradiation. The spectroscopic and photochromic properties of the oxalatochromate (Sp) 3 Cr(C 2 O 4 ) 3 are similar to those of the iodide SpI. The magnetic properties of (Sp) 3 Cr(C 2 O 4 ) 3 were studied before and after UV irradiation.
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