2021
DOI: 10.1063/5.0070333
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Growth of MoS2–Nb-doped MoS2 lateral homojunctions: A monolayer pn diode by substitutional doping

Abstract: Monolayer transition metal dichalcogenides (TMDs) have been considered as promising materials for various next-generation semiconductor devices. However, carrier doping techniques for TMDs, which are important for device fabrication, have not been completely established yet. Here, we report a monolayer p–n junction formed using in situ substitutional doping during chemical vapor deposition (CVD). We synthesized monolayer MoS2–Nb-doped MoS2 lateral homojunctions using CVD and then characterized their physical a… Show more

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Cited by 10 publications
(14 citation statements)
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“…During the growth, the pressure inside the chamber was maintained at 1 kPa. After the growth, the furnace was rapidly cooled to keep the sample from excess annealing and further adhering of the Na-containing compound . In the case of WS 2 growth onto hBN and SiO 2 /Si, at first, hBN flakes (HQ Graphene) were mechanically exfoliated onto the right half of an as-oxidized SiO 2 /Si using a 3M BK-24 tape at ambient condition.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…During the growth, the pressure inside the chamber was maintained at 1 kPa. After the growth, the furnace was rapidly cooled to keep the sample from excess annealing and further adhering of the Na-containing compound . In the case of WS 2 growth onto hBN and SiO 2 /Si, at first, hBN flakes (HQ Graphene) were mechanically exfoliated onto the right half of an as-oxidized SiO 2 /Si using a 3M BK-24 tape at ambient condition.…”
Section: Methodsmentioning
confidence: 99%
“…After the growth, the furnace was rapidly cooled to keep the sample from excess annealing and further adhering of the Na-containing compound. 73 In the case of WS 2 growth onto hBN and SiO 2 /Si, at first, hBN flakes (HQ Graphene) were mechanically exfoliated onto the right half of an as-oxidized SiO 2 /Si using a 3M BK-24 tape at ambient condition. After the exfoliation, the substrates were annealed in air at 700 °C for 30 min to remove residual adhesives.…”
Section: Methodsmentioning
confidence: 99%
“…Spatially resolved C 1s core-level photoelectron spectra were obtained using the 3D nano-ESCA system [13][14][15][16][17] as shown in figure 1(b). This equipment was installed at the soft x-ray beamline, BL07LSU, in SPring-8.…”
Section: Spectromicroscopy Analysismentioning
confidence: 99%
“…We employed a synchrotron soft x-ray scanning photoelectron microscope, called '3D nano-ESCA' [13], composed of a Fresnel zone plate (NTT-AT) for x-ray focusing and an angle resolved photoelectron analyzer (Scienta-Omicron R3000-EWAL). Surface chemical states and carrier distributions in atomic layer device structures have been clarified using this method [14][15][16][17].…”
Section: Introductionmentioning
confidence: 99%
“…Semiconductor heterostructures play an important role in the development of modern low-dimensional physics and optical/electronic device applications. Recently, transition metal dichalcogenides (TMDCs) have attracted much attention due to their future device applications. For their device applications, the use of in-plane heterostructures based on TMDCs provides a scalable way to create basic device structures, including pn junctions, semiconductor heterojunctions, and metal/semiconductor junctions. Such structures have been used to demonstrate various devices, including field-effect transistors, pn diodes, photodetectors, and light-emitting diodes. Importantly, in-plane heterostructures can be prepared through scalable vapor-phase growth processes, such as chemical vapor deposition (CVD).…”
mentioning
confidence: 99%