2018
DOI: 10.7567/jjap.57.08rd09
|View full text |Cite
|
Sign up to set email alerts
|

Growth of InGaAs(P) in planetary metalorganic vapor phase epitaxy reactor using tertiarybutylarsine and tertiarybutylphosphine for photovoltaic applications

Abstract: The effects of wafer (surface) temperature on the surface morphologies of InP, InGaAsP, and InGaAs grown in a planetary metalorganic vapor phase epitaxy (MOVPE) reactor using tertiarybutylarsine (TBA) and tertiarybutylphosphine (TBP) as group V precursors were investigated. Compared with small horizontal reactors, InP growths require a relatively low temperature to prevent TBP predecomposition and parasitic gasphase reactions. However, such a low temperature can prevent the surface migration of In adatoms and … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4

Citation Types

0
11
0

Year Published

2019
2019
2023
2023

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 10 publications
(11 citation statements)
references
References 26 publications
0
11
0
Order By: Relevance
“…However, Ge is relatively abundant in supply and rather a cost-effective material to fabricate TPV cells [15], [16]. On the other hand, InGaAs is a direct III-V semiconductor material that has excellent optical and electrical properties, such as strong light absorption, high diffusion coefficient, long carrier lifetime, and large carrier diffusion length [17], [18]. On top of that, the maturity of InGaAs and monolithic interconnected module (MIM) lattice-matched to the available indium phosphide (InP) substrate makes it a suitable candidate for large-scale production [19].…”
Section: Introductionmentioning
confidence: 99%
“…However, Ge is relatively abundant in supply and rather a cost-effective material to fabricate TPV cells [15], [16]. On the other hand, InGaAs is a direct III-V semiconductor material that has excellent optical and electrical properties, such as strong light absorption, high diffusion coefficient, long carrier lifetime, and large carrier diffusion length [17], [18]. On top of that, the maturity of InGaAs and monolithic interconnected module (MIM) lattice-matched to the available indium phosphide (InP) substrate makes it a suitable candidate for large-scale production [19].…”
Section: Introductionmentioning
confidence: 99%
“…It is worth mentioning that the existing epitaxy growth technology of metal-organic vapor-phase epitaxy (MOVPE) has the ability to produce In0.53Ga0.47As/InP heterojunction with high crystal quality and low defect density 26,27 . The main structure of In0.53Ga0.47As configuration includes the emitter, base, front surface field (FSF), back surface field (BSF), cap and buffer layers.…”
Section: Introductionmentioning
confidence: 99%
“…The main structure of In0.53Ga0.47As configuration includes the emitter, base, front surface field (FSF), back surface field (BSF), cap and buffer layers. In previous literature, the base thickness was reported between 1 and 5 µm, and emitter thickness was between 0.05 and 0.44 µm [27][28][29] . Several structures reported the use of highly doped In0.53Ga0.47As cap layer ~ 1  10 19 cm -3 and highly doped InP BSF/buffer layer ≥ 1  10 18 cm -3 .…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…For InGaAs cells grown by metalorganic vapor phase epitaxy (MOVPE), Wanlass et al has reported a W OC of 340 mV for cells operated under an air mass of zero at one sun . Likewise, Sodabanlu et al has reported a W OC of 360 mV for cells grown using tertiarybutylphosphine (TBP), whereas France et al has reported lattice‐mismatched metamorphic cells grown on GaAs substrates with a W OC of 380 mV . These defecits are all below 400 mV, a standard benchmark for high‐material‐quality solar cells …”
Section: Introductionmentioning
confidence: 99%