Growth of highly (110)- and (111)-textured SrTiO3 thin films on Pt(111)/α-Al2O3(0001) substrates by ECR ion beam sputter deposition

Panomsuwan, Gasidit; Takai, Osamu; Saito, Nagahiro

doi:10.1016/j.ssc.2012.12.026

Cited by 6 publications

(1 citation statement)

References 28 publications

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“…Various methods had been developed to prepare STO film such as radio frequency sputtering, spray inductively coupled plasma technique, pulsed laser deposition, molecular beam epitaxy, sol‐gel, electron cyclotron resonance ion beam sputter deposition, metal‐organic chemical vapor deposition (MOCVD), and laser chemical vapor deposition (laser CVD) . Among these techniques, the laser CVD was considered as a more promising approach due to its high deposition rate ( R dep ) and excellent control of film orientation .…”

Section: Introductionmentioning

confidence: 99%

Preparation of (110)‐oriented SrTiO₃ film on quartz glass by laser chemical vapor deposition

Zhao

Zhang

et al. 2018

J Am Ceram Soc

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SrTiO3 (STO) film was prepared on quartz glass by laser chemical vapor deposition at a deposition temperature (Tdep) ranged from 760 to 1104 K. Effect of the Tdep on the orientation, crystallinity, texture, and microstructure of the STO film was investigated. As the Tdep was increased, the preferred orientation of the STO film tended to be (110)‐orientated with corresponding texture coefficient (TC) on the (110) reflection enhanced from 2.3 to 6; meanwhile, the full width at half maximum of the ω‐scan on the (110) reflection decreased from 0.85° to 0.59°. The (110)‐oriented grains were in wedge shape about 60 × 150 nm in size, which tended to be flat at an elevated Tdep of 1104 K.

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Section: Introductionmentioning

confidence: 99%

Preparation of (110)‐oriented SrTiO₃ film on quartz glass by laser chemical vapor deposition

Zhao

Zhang

et al. 2018

J Am Ceram Soc

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Unraveling the Origin and Mechanism of Nanofilament Formation in Polycrystalline SrTiO₃ Resistive Switching Memories

et al. 2019

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Three central themes in the study of the phenomenon of resistive switching are the nature of the conducting phase, why it forms, and how it forms. In this study, the answers to all three questions are provided by performing switching experiments in situ in a transmission electron microscope on thin films of the model system polycrystalline SrTiO3. On the basis of high‐resolution transmission electron microscopy, electron‐energy‐loss spectroscopy and in situ current–voltage measurements, the conducting phase is identified to be SrTi11O20. This phase is only observed at specific grain boundaries, and a Ruddlesden–Popper phase, Sr3Ti2O7, is typically observed adjacent to the conducting phase. These results allow not only the proposal that filament formation in this system has a thermodynamic origin—it is driven by electrochemical polarization and the local oxygen activity in the film decreasing below a critical value—but also the deduction of a phase diagram for strongly reduced SrTiO3. Furthermore, why many conducting filaments are nucleated at one electrode but only one filament wins the race to the opposite electrode is also explained. The work thus provides detailed insights into the origin and mechanisms of filament generation and rupture.

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Controlled crystalline orientation of SrTiO3 thin films grown on Pt(111)/Ti/α-Al2O3(0001) substrates: Effect of growth temperature and Ti layer thickness

Panomsuwan

Takai

Saito

2014

Applied Surface Science

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Growth of highly (110)- and (111)-textured SrTiO3 thin films on Pt(111)/α-Al2O3(0001) substrates by ECR ion beam sputter deposition

Cited by 6 publications

References 28 publications

Preparation of (110)‐oriented SrTiO₃ film on quartz glass by laser chemical vapor deposition

Preparation of (110)‐oriented SrTiO₃ film on quartz glass by laser chemical vapor deposition

Unraveling the Origin and Mechanism of Nanofilament Formation in Polycrystalline SrTiO₃ Resistive Switching Memories

Controlled crystalline orientation of SrTiO3 thin films grown on Pt(111)/Ti/α-Al2O3(0001) substrates: Effect of growth temperature and Ti layer thickness

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Growth of highly (110)- and (111)-textured SrTiO3 thin films on Pt(111)/α-Al2O3(0001) substrates by ECR ion beam sputter deposition

Cited by 6 publications

References 28 publications

Preparation of (110)‐oriented SrTiO3 film on quartz glass by laser chemical vapor deposition

Preparation of (110)‐oriented SrTiO3 film on quartz glass by laser chemical vapor deposition

Unraveling the Origin and Mechanism of Nanofilament Formation in Polycrystalline SrTiO3 Resistive Switching Memories

Controlled crystalline orientation of SrTiO3 thin films grown on Pt(111)/Ti/α-Al2O3(0001) substrates: Effect of growth temperature and Ti layer thickness

Contact Info

Product

Resources

About

Preparation of (110)‐oriented SrTiO₃ film on quartz glass by laser chemical vapor deposition

Preparation of (110)‐oriented SrTiO₃ film on quartz glass by laser chemical vapor deposition

Unraveling the Origin and Mechanism of Nanofilament Formation in Polycrystalline SrTiO₃ Resistive Switching Memories