Preparation of (110)‐oriented SrTiO₃ film on quartz glass by laser chemical vapor deposition

Abstract

SrTiO3 (STO) film was prepared on quartz glass by laser chemical vapor deposition at a deposition temperature (Tdep) ranged from 760 to 1104 K. Effect of the Tdep on the orientation, crystallinity, texture, and microstructure of the STO film was investigated. As the Tdep was increased, the preferred orientation of the STO film tended to be (110)‐orientated with corresponding texture coefficient (TC) on the (110) reflection enhanced from 2.3 to 6; meanwhile, the full width at half maximum of the ω‐scan on the (110) reflection decreased from 0.85° to 0.59°. The (110)‐oriented grains were in wedge shape about 60 × 150 nm in size, which tended to be flat at an elevated Tdep of 1104 K.