Growth of carbon nanotubes at temperatures compatible with integrated circuit technologies

Efficient Coupling of Optical Energy for Rapid Catalyzed Nanomaterial Growth: High-Quality Carbon Nanotube Synthesis at Low Substrate Temperatures

“…Therefore, unless an accurate understanding of the catalyst heat-treatment and CNT growth mechanism is established, pre-determined and controlled growth will not be possible. As the temperature in the PTCVD system depends critically on the flow rates of gases and pressure inside the chamber, 34 we utilized this attribute of the system to confirm our second assumption. We turned the lamps on at 40% power under vacuum (1.6 × 10 -5 Torr) with no gases flowing through the chamber.…”

Photo-thermal chemical vapor deposition growth of graphene

“…The thermal barrier on the substrate support is made from a bilayer of Ti/TiN which helps to enhance the surface temperature [9]. Ni foil (Alfa Aesar, product 10254) was first cleaned by acetone, IPA and methanol and placed on the substrate holder.…”

“…Previously, we reported carbon nanotube synthesis by a photo-thermal chemical vapour deposition (PT-CVD) method [9,10]. PT-CVD can offer several technological advantages over conventional CVD compared to conventional thermal CVD methods.…”

“…Since this surface radiant energy deposition can be affected by a variety of factors like wavelength dependent absorption of the thermal energy, reflections of thermal energy from the enclosing vacuum chamber among others, the mechanism is still not well understood [11]. The PT-CVD design uses a rapid optical infrared (IR) heating source to deliver the energy from above the substrate with a thermal barrier layer on the substrate which helps to absorb and reflect the IR radiation back to the metal sample resulting in more efficient energy usage for the growth process [9]. While most reported graphene CVD growth uses a hot-wall system, there is an advantage of using cold-wall CVD instead as deposition on side-walls leading to sample contamination can be minimized [11].…”

Multiwalled Carbon Nanotubes for Amperometric Array-Based Biosensors

“…Lowering the growth temperature has frequently proven to be ineffective because the structural quality of nanotubes usually degrades as reaction temperatures are decreased. Chen et al [35] succeeded in growing CNTs at CMOS compatible temperature (350…”