2004
DOI: 10.1021/nl048740j
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Growth of Carbon Nanofibers on Tipless Cantilevers for High Resolution Topography and Magnetic Force Imaging

Abstract: Carbon nanofibers are grown on tipless cantilevers as probe tips for scanning probe microscopy. A catalyst dot pattern for carbon nanofiber growth is formed on the surface of the tipless cantilevers using electron beam lithography, and the growth of carbon nanofibers is performed in a direct-current plasma-enhanced chemical vapor deposition reactor. Atomic force surface imaging and magnetic force-gradient imaging have been demonstrated using these probe tips.

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Cited by 66 publications
(39 citation statements)
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“…16,17 These approaches, however, require somewhat complicated, multiple patterning steps. The catalyst dots in both approaches are patterned by the lift-off of the spin-coated polymethyl methacrylate ͑PMMA͒ layer following typical electron-͑e-͒ beam lithography.…”
mentioning
confidence: 99%
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“…16,17 These approaches, however, require somewhat complicated, multiple patterning steps. The catalyst dots in both approaches are patterned by the lift-off of the spin-coated polymethyl methacrylate ͑PMMA͒ layer following typical electron-͑e-͒ beam lithography.…”
mentioning
confidence: 99%
“…In one of these reports, 16 patterned catalyst dots were formed before the fabrication of the cantilevers, but the catalyst had to be protected by the PECVD-deposited Si 3 N 4 layer in order for the catalyst dots to survive and keep catalytic activity throughout the subsequent microfabrication steps. In the other report, 17 the e-beam lithography steps had to be used twice to pattern a catalyst dot on the commercial tipless cantilever in order to remove the extra Ni catalyst on the cantilever. The probe tip radii reported are also relatively large.…”
mentioning
confidence: 99%
“…In recent years, carbon nanofibers (CNFs) have triggered great attention due to their wide application potential, such as candidate materials for electronic components, hydrogen storage, polymer additives, functional composites, catalysts and catalytic supports [12][13][14]. Furthermore, their versatility is further highlighted by potential acting as efficient templates for novel material fabrication [15][16][17][18][19][20].…”
Section: Introductionmentioning
confidence: 99%
“…Among them, carbon nanotubes (CNTs) are extremely attractive in bioanalytical area due to its properties of non-toxicity, high surface area, and acceptable biocompatibility. [9][10][11][12] They can be used not only as biocompatible immobilization matrices for biomolecules; but also can transduce the electrochemical signal acting as nanoscaled electrical wires for redox-active molecules. [13][14][15] It has proved that CNTs can be coupled to enzymes to act as electrical connectors between the redox center of the enzymes and the electrodes.…”
Section: Introductionmentioning
confidence: 99%