2008
DOI: 10.3938/jkps.53.442
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Growth of Boron-Doped-ZnO by RF Magnetron Sputtering for CIGS Solar Cells

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Cited by 8 publications
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“…Among the TCOs, zinc oxide (ZnO) is popular because of its interesting structural, chemical, optical, and electrical properties [1][2][3]. It was one of the first studied wide band gap semiconductors with respect to its surface properties, optical properties, and gas sensing properties [1][2][3][4].…”
Section: Introductionmentioning
confidence: 99%
“…Among the TCOs, zinc oxide (ZnO) is popular because of its interesting structural, chemical, optical, and electrical properties [1][2][3]. It was one of the first studied wide band gap semiconductors with respect to its surface properties, optical properties, and gas sensing properties [1][2][3][4].…”
Section: Introductionmentioning
confidence: 99%
“…The growth of boron-doped zinc oxide (BZO) thin films by RF magnetron sputtering has advantages of better IR transmission than that of aluminum-doped zinc oxide (AZO) thin films, 14) and AZO thin films prepared by successive ion layer adsorption and reaction have deep donor levels. 15) Although BZO thin films deposited by spray pyrolysis have been reported, 16) these BZO thin films showed a large resistivity range 17,18) and there has been no report regarding various resistivities as a function of temperature for the spray-pyrolized BZO thin film.…”
Section: Introductionmentioning
confidence: 99%