2015
DOI: 10.7567/jjap.54.04dh03
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Growth of 2 inch Si0.5Ge0.5bulk single crystals

Abstract: Two inch homogeneous Si0.5Ge0.5 bulk single crystals were grown by the traveling liquidus zone (TLZ) method for fabricating substrates for strained Si and strained Ge devices. The concentration variation was less than 1% for the whole area of a disc sliced perpendicular to the growth axis, showing excellent compositional uniformity. The axial compositional variation was less than 2% over a length of 5 mm. The FWHM values of X-ray rocking curves for 004 diffraction were in the range between 31 and 47 arcsec, sh… Show more

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Cited by 13 publications
(6 citation statements)
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“…By conventional Czochralski technique 5 single crystals of alloys could be grown, but only for the case of Ge or Si rich alloys. By traveling liquidus zone method 6, 7 single crystals of the Si 50 Ge 50 alloy could be prepared, but the size was limited to 2 mm in diameter due to gravity-driven convection and subsequent segregation. However, the growth of large size Si 50 Ge 50 single crystals was reported recently on board the ISS under microgravity (µg) conditions.…”
Section: Introductionmentioning
confidence: 99%
“…By conventional Czochralski technique 5 single crystals of alloys could be grown, but only for the case of Ge or Si rich alloys. By traveling liquidus zone method 6, 7 single crystals of the Si 50 Ge 50 alloy could be prepared, but the size was limited to 2 mm in diameter due to gravity-driven convection and subsequent segregation. However, the growth of large size Si 50 Ge 50 single crystals was reported recently on board the ISS under microgravity (µg) conditions.…”
Section: Introductionmentioning
confidence: 99%
“…TO-phonon-assisted lines of each sample derived from Si spacers are almost the same full width at half maximum (FWHM), which indicates that there is no difference in sample temperature. The SL and nanodots show significantly strong SiGe-derived PL, compared to the single crystalline bulk Si 0.68 Ge 0.32 26) as shown in Fig. 3(b), which indicates that carrier confinement occurs in the SL and the nanodots.…”
Section: Optical Properties Evaluation Of the Self-ordered Multilayer...mentioning
confidence: 89%
“…Single-crystalline SiGe samples were prepared for Raman spectroscopy by two growth methods: Czochralski (Cz) [26][27][28] and traveling liquidus zone (TLZ). [29][30][31] The sample characteristics are summarized in Table I. The crystal orientation, Ge fraction, and the full width at half maximum (FWHM) were confirmed by X-ray diffraction (XRD).…”
Section: Methodsmentioning
confidence: 99%