2013
DOI: 10.1016/j.jcrysgro.2013.03.012
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Growth mode transition and relaxation of thin InGaN layers on GaN (0001)

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Cited by 21 publications
(18 citation statements)
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“…The average layer thickness and the indium incorporation as a function of growth temperatures were investigated by analyzing o/2y X-ray scan from (0002) reflections. Since the position of the InGaN peak relative to GaN peak in X-ray spectra depends on indium content as well as on the strain in InGaN layer, the strain was independently extracted from reciprocal space map (RSM) from an asymmetric reflection (10)(11)(12)(13)(14)(15). It should be noted that diffracted intensity around (10-15) reflection from InGaN layer was very poor, and hence recoding the RSM was not easy for thin InGaN layers.…”
Section: Growth Of Ingan Qdsmentioning
confidence: 99%
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“…The average layer thickness and the indium incorporation as a function of growth temperatures were investigated by analyzing o/2y X-ray scan from (0002) reflections. Since the position of the InGaN peak relative to GaN peak in X-ray spectra depends on indium content as well as on the strain in InGaN layer, the strain was independently extracted from reciprocal space map (RSM) from an asymmetric reflection (10)(11)(12)(13)(14)(15). It should be noted that diffracted intensity around (10-15) reflection from InGaN layer was very poor, and hence recoding the RSM was not easy for thin InGaN layers.…”
Section: Growth Of Ingan Qdsmentioning
confidence: 99%
“…However, the thermodynamics leading to the formation of such 2D island like structure for InGaN is still not fully understood. From the in-situ ellipsometric data we intend to report that this morphology forms only after the metalorganic flow is stopped, which will be discussed elsewhere [12].…”
Section: Growth Of Ingan Qdsmentioning
confidence: 99%
“…While in some applications, the former can be desired, the latter induces low quality layers with a high dislocation density, particularly on hetero-interfaces [14,15]. Zhao et al [37] and Pristovsek et al [38] described theoretically and experimentally the InGaN growth with metal-organic vapor phase epitaxy (MOVPE) on a GaN buffer layer having a [0001] growth direction. Their attention was focused on In content and the growth process parameters' influence on the critical thicknesses for two relaxation mechanisms, in order to establish what occurs in each heterostructure.…”
Section: Physical Parameters Gan Inn Bowing Parametersmentioning
confidence: 99%
“…19 Thus E crit might be related to the formation of dislocations at or very close to the surface, breaking just a single bond. 8 Moreover, the critical thickness in Fig. 1 is valid only for a single QW.…”
mentioning
confidence: 99%
“…However a higher indium content in the quantum wells (QWs) results in an earlier transition to three dimensional growth and then relaxation. [1][2][3][4][5][6][7][8] InN on GaN relaxes after 1.1 ML of deposited material, 4 and islanding starts even before. 9 Therefore, for very high indium contents the QWs need to be very thin.…”
mentioning
confidence: 99%