Applied Physics Letters
 2013
DOI: 10.1063/1.4835075
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Growth direction of oblique angle electron beam deposited silicon monoxide thin films identified by optical second-harmonic generation

Søren Vejling Andersen
1
,
Mads Lund Trolle
2
,
Kjeld Pedersen
3

Abstract: Optical and structural characterization of thermal oxidation effects of erbium thin films deposited by electron beam on silicon

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