Growth characteristics of tungsten-carbon films deposited by magnetron sputtering

Harry, E.; Pauleau, Y.; Adamik, M.; Barna, P.B.; Sulyok, A.; Menyhárd, M.

doi:10.1016/s0257-8972(97)00635-x

Cited by 5 publications

(2 citation statements)

References 8 publications

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“…Normally, the incorporated metal is Ti, Cr or W, all of which exhibit a strong bond with the carbon matrix 10–14. However, some other metals (Al, Cu and Ag) exhibit a weak bond with the carbon matrix that are called weak‐carbide‐forming (WCF) metals 15–18.…”

Section: Introductionmentioning

confidence: 99%

The structure and tribological properties of aluminum/carbon nanocomposite thin films synthesized by reactive magnetron sputtering

Zhou

Wang

Xue

2010

Surface & Interface Analysis

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Hydrogenated nanocomposite aluminum/carbon thin films (Al/a-C : H) were fabricated on stainless steel and silicon wafer substrates via unbalanced reactive magnetron sputtering from an Al target in CH 4 /Ar plasma. The composition and structure of Al/a-C : H films were investigated by high-resolution transmission electron microscope (HRTEM), XPS and micro-Raman spectroscopy. Nanoindenter, interferometer and ball-on-disc tribometer were carried out to evaluate the hardness, internal stress and tribological properties of Al/a-C : H films. HRTEM observations confirmed that the metallic Al nanocrystallites were uniformly dispersed in the amorphous carbon matrix. XPS and Raman analyses indicated that the sp 2 content increased with the increase of Al content in the films. Nanoindenter and interferometer tests exhibited that the uniform incorporation of Al nanocrystallites can diminish drastically the magnitude of internal stress with maintaining the higher hardness of as-deposited films. Especially, the ball-on-disc tribometer measurements revealed that the nanocomposite film with 2.3 at.% Al content exhibited relatively better wear resistance and self-lubrication performance with a friction coefficient of 0.06 and wear rate of 3.1 × 10 −16 m 3 / N·m under ambient air, which can be attributed to the relatively higher hardness, the formation of continuous graphitized transfer film on counterface and the reduced reaction of oxygen with carbon.

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Section: Introductionmentioning

confidence: 99%

The structure and tribological properties of aluminum/carbon nanocomposite thin films synthesized by reactive magnetron sputtering

Zhou

Wang

Xue

2010

Surface & Interface Analysis

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“…Carbon and tungsten sputtering by noble gases ion bombardment has received considerable attention in recent studies of plasma-wall interaction [1][2][3], thin film deposition [4] and other surface science applications [5]. Many studies have shown that the physical properties of deposited carbon and tungsten film strongly depend on the sputtering parameters, like: gas pressure, energy and nature of sputtering gasses [6], target density [7], substrate temperature, target bias voltage, target to substrate distances and deposition angle [8].…”

Section: Introductionmentioning

confidence: 99%

Carbon and tungsten sputtering in a helium magnetron discharge

Tiron

Andrei

Nastuta

et al. 2008

2008 23rd International Symposium on Discharges and Electrical Insulation in Vacuum

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This study reports on carbon and tungsten deposition on a heated silicon substrate under He + bombardment in a magnetron sputtering device. The discharge was operated at constant pressure of 1.33 Pa for two discharge current intensities (200 mA and 600 mA) and target power density up to 40 Wcm -2 . The deposited films were characterized by scanning electron microscopy (SEM), atomic force microscopy (AFM) and X-Ray diffractometry (XRD). The topography and cross section reveals the influence of the target power density on the surface roughness, grains size and thickness of the deposited films.

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Preparation of metal (W, Mo, Nb, Ti) containing a-C:H films by reactive magnetron sputtering

Corbella

Vives

Pinyol

et al. 2004

Surface and Coatings Technology

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Growth characteristics of tungsten-carbon films deposited by magnetron sputtering

Cited by 5 publications

References 8 publications

The structure and tribological properties of aluminum/carbon nanocomposite thin films synthesized by reactive magnetron sputtering

The structure and tribological properties of aluminum/carbon nanocomposite thin films synthesized by reactive magnetron sputtering

Carbon and tungsten sputtering in a helium magnetron discharge

Preparation of metal (W, Mo, Nb, Ti) containing a-C:H films by reactive magnetron sputtering

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