2009
DOI: 10.1016/j.jcrysgro.2008.09.012
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Growth behavior of AlInGaN films

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Cited by 15 publications
(8 citation statements)
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References 17 publications
(20 reference statements)
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“…We assumed on other reports with reference that the peak in adjacent to the 35.1 was denoted from AlInGaN. 13) The strain increased when Indium was added as we expected versus the AlGaN active layer. It also means AlInGaN can be grown and contain in the active layer.…”
Section: Resultsmentioning
confidence: 93%
“…We assumed on other reports with reference that the peak in adjacent to the 35.1 was denoted from AlInGaN. 13) The strain increased when Indium was added as we expected versus the AlGaN active layer. It also means AlInGaN can be grown and contain in the active layer.…”
Section: Resultsmentioning
confidence: 93%
“…film, but there existed V-shaped pits with six-wall sides along (1011) on the surface of the AlInGaN samples. In the previous report about InGaN, V-shaped pits were usually considered to be related to indium segregation on the {1011} plane [16,17]. To investigate the effect of TMA flow rate on the optical properties of quaternary AlInGaN films, photoluminescence (PL) characteristics of the samples are shown in Figure 5.…”
Section: Figure 1amentioning
confidence: 99%
“…It can be concluded from the room temperature Hall mobility data of 2200 cm 2 /(Vs) (Al 0.72 In 0.11 Ga 0.17 N), 4 and 1770 cm 2 /(Vs) (Al 0.83 In 0.13 Ga 0.04 N), 5 and 1318 cm 2 /(Vs) (Al 0. 12 In 0.006 Ga 0.874 N), 6 8 that increasing the composition dependent electron mobility assists to enhance the performance of the In x Al y Ga 1-x-y N heterojunction field effect transistors (HFETs). In our previous work, 9 we established the model of the alloy disorder scattering limited mobility in AlInGaN/GaN heterojunctions using virtual crystal approximation, and put forward some guidance to estimate the direction of the mobility change with the Al(In,Ga)N composition.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, the growth of this quaternary AlInGaN film is still challenging due to the widely existed alloy compositional fluctuations caused by a very large lattice mismatch between the InN and AlN (GaN). [10][11][12] D.-B. Li et.…”
Section: Introductionmentioning
confidence: 99%