Growth and Structure of Polycrystalline Indium Phosphide Layers on Molybdenum Sheets

Abstract

Pinholeless polycrystalline indium phosphide layers were grown on molybdenum sheets at temperatures lower than 600°C using indium and phosphorus trichloride as the source materials. The low activation energy of the deposition rates and weak dependence of the rates on the partial pressure of indium monochloride suggest that surface processes play an important role in the growth of polycrystalline films. It was ascertained by an x‐ray diffraction measurement that the {110} and {331} orientations become noticeable with increasing thickness at higher temperatures, whereas the <111> orientation is dominant at lower growth temperatures. The development of the <110> orientation produces films with a columnar structure, which could be explained by the dependence of the growth rate on the crystallographic orientation.

High optical quality polycrystalline indium phosphide grown on metal substrates by metalorganic chemical vapor deposition

“…Untreated InP has a drastically lower SRV ($10 3 cm s À1 ) 9-15 as compared to GaAs ($10 6 cm s À1 ), 15,16 making it an ideal candidate for efficient poly-crystalline cells. However, while poly-GaAs has been widely explored in the past, 17,18 there have been few reports of poly-InP in terms of growth techniques, [19][20][21] material quality, 9,22 or device performance. 23,24 Here, we report on high optical quality poly-InP thin films grown on molybdenum thin film and foil substrates, by metalorganic chemical vapor deposition (MOCVD).…”

Electrical Properties of n‐Type Polycrystalline Indium Phosphide Films

“…Polycrystalline films were prepared on 50 ~m thick molybdenum sheets by chemical vapor deposition (4). The molybdenum sheets were cleaned in organic solvents and subsequently etched in a 1H2SO4-1HNOs-3H20 solution prior to indium phosphide deposition.…”

“…Polycrystalline films of various semiconductors have been used in fabricating low cost solar cells (1)(2)(3). Consequently, the growth and structure of polycrystalline indium phosphide films have been investigated by the authors (4,5). Understanding of the electronic transport properties of polycrystalline films are considered critical to the realization of solar cells with high conversion efficiencies.…”

Electrochemically Fabricated Alloys and Semiconductors Containing Indium

“…Physical methods include thermal evaporation, 22,23) sputtering, 24,25) and pulsed laser deposition. 26) Chemical methods for the preparation of thin film alloys include approaches such as chemical vapor deposition, 27,28) chemical bath deposition, 29) electrodeposition, 8,29) and spray pyrolysis. 30,31) Molecular-beam epitaxy (MBE) 32,33) can be a physical or a chemical method, because the beam of materials can be generated by physical means or by chemical reactions.…”