We use pulsed laser deposition to grow YBa2Cu3O 7−δ (YBCO) superconducting lms for microwave applications. The lms are grown on R-cut sapphire substrates, with CeO2 buer layers, which are re-crystallized at high temperature prior to YBCO growth. Using the atomic force microscopy (AFM) and X-ray diractometry we determine the optimal temperature for recrystallization (1000• C) and the optimal buer layer thickness (30 nm).The properties of YBCO lms of various thickness, grown on the optimized CeO2 buer layers, are studied using several methods, including AFM, magnetooptical imaging, and transport experiments. The YBCO lm roughness is found to increase with the increasing lm thickness, but the magnetic ux penetration in the superconducting state remains homogeneous. The superconducting parameters (the critical temperature and the critical current density) are somewhat lower than the similar parameters for YBCO lms deposited on mono-crystalline substrates.