Growth and high frequency characterization of Mn doped sol-gel PbxSr1−xTiO3 for frequency agile applications

Abstract

In pursuit of thin film ferroelectric materials for frequency agile applications that are both easily adapted to large area deposition and also high performance, an investigation has been carried out into sol-gel deposition of 3% Mn doped ͑Pb 0.4 Sr 0.6 ͒TiO 3 . Large area capability has been demonstrated by growth of films with good crystallinity and grain structure on 4 in. Si wafers. Metal-insulator-metal capacitors have also been fabricated and development of an improved de-embedding technique that takes parasitic impedances fully into account has enabled accurate extraction of the high frequency dielectric properties of the Pb x Sr 1−x TiO 3 films. Practically useful values of ϳ 1000, tan ␦ ϳ 0.03, and tunability ϳ50% have been obtained in the low gigahertz range ͑1-5 GHz͒. Peaks in the dielectric loss due to acoustic resonance have been modeled and tentatively identified as due to an electrostrictive effect with an electromechanical coupling coefficient of ϳ0.04 at an electric field of 240 kV/cm which is potentially useful for tunable thin film bulk acoustic wave devices.

Electrically tunable dielectric materials and strategies to improve their performances

“…There was also a report on the dielectric properties of PST thin films modified by doping with Mn [139]. Pb 0.4 Sr 0.6 Ti 1-x Mn x O 3 thin films, with x=0-0.05, were deposited on Pt/Ti/SiO 2 /Si substrates, via a sol-gel process.…”

Temperature dependent optical properties of Mn doped (Pb,Sr)TiO3 ferroelectric films in absorption region: Electron–phonon interaction

“…[6][7][8][9] Typically, Fragkiadakis et al 7 and Yang et al 8,9 testified that Mn doping can improved the ferroelectric polarization and enhanced dielectric properties of PST films. 1 Recently, extensive investigations were focused on ͑Pb, Sr͒TiO 3 ͑PST͒ ferroelectric films in view of their excellent dielectric and ferroelectric properties.…”

Dielectric Tunability of Mn Doped Pb_0.3Sr_0.7TiO₃ Multilayered Thin Films Prepared by Sol-Gel Method

“…Ferroelectric materials have attracted significant interest as active elements of tunable microwave devices, such as voltage tunable phase shifters, delay line, filters, oscillators and parametric amplifiers, for their highly nonlinear dielectric response to an applied electric field [1][2][3][4]. Lead strontium titanate (Pb x Sr 1-x )TiO 3 is one of the leading candidates for such applications.…”