Control over ferroelectric polarization variants in BiFeO 3 films through the use of various vicinal SrTiO 3 substrates is demonstrated. The ferroelectric polarization variants in these films are characterized by piezoelectric force microscopy and the corresponding structural variants are carefully analyzed and confirmed by X-ray diffraction. Implementation of this approach has given us the ability to create single domain BiFeO 3 films on (001), (110), and (111) surfaces. The piezo/ ferroelectric properties of the BiFeO 3 films, in turn, can be tailored through this approach. Such results are very promising for continued exploration of BiFeO 3 films and provide a template for detailed multiferroic-coupling studies in the magnetoelectric BiFeO 3 system. Magnetoelectric coupling in multiferroic materials has attracted much attention because of the intriguing science underpinning this phenomenon. Additionally, there is an exciting potential for applications and devices that take advantage of these materials with multiple order parameters. [1][2][3][4] BiFeO 3 (BFO) is a room temperature, single-phase magnetoelectric multiferroic with a ferroelectric Curie temperature of ∼ 1103 K [5] and an antiferromagnetic Néel temperature of ∼ 643 K.[6] Recent studies of BFO thin films have shown the existence of a large ferroelectric polarization, as well as a small net magnetization of the Dzyaloshinskii-Moriya type resulting from a canting of the antiferromagnetic sublattice. [7,8] The ferroelectric polarization in BFO can have orientations along the four cube diagonals (<111>), and the direction of the polarization can be changed by ferroelectric and ferroelastic switching. [9] Our previous studies have shown coupling between ferroelectricity and antiferromagnetism in BFO thin films resulting from the coupling of both antiferromagnetic and ferroelectric domains to the underlying ferroelastic domain switching events.[10] Such a study was a crucial first step in the exploration of approaches to control and manipulate magnetic properties using an electric field. It was also noted, however, that these films exhibit a very complicated domain structure, which complicates the interpretation of the fundamental properties of this system as well as the interactions across hetero-interfaces. The lack of large single crystals of the desired crystallographic orientation provokes another motivation to explore approaches to create "single crystalline" epitaxial films that are free of ferroelectric/ferroelastic domains. Recent studies have explored the ability to control the ferroelectric domain configuration, which is formed after the phase transformation, through substrate engineering. [11,12] In this study, we demonstrate an approach to control the ferroelectric domain structure in BFO films through the use of vicinal SrTiO 3 (STO) substrates. This has enabled us to create thin films that "mimic" the primary crystal facets of the pseudo-cubic unit cell, namely single domain (100), (110), and (111) surfaces. The ferroelectric domain structu...