Gripping control of delicate and flexible object by electromotive manipulator with proximity and tactile combo MEMS sensor

Araki, Ryoma; Suga, Fumitoshi; Abe, Takashi; Noma, Hiroyasu; Sohgawa, Masayuki

doi:10.1109/transducers.2017.7994254

Cited by 8 publications

(2 citation statements)

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“…Thus, the light intensity can be detected as decrease of the impedance of the electrode [16]. In previous works, the light is detected as impedance between wiring electrodes [16,17]. It is found that contribution of depletion layer capacitance to light sensitivity is larger than that of resistance in the Si layer [18], however, effect of resistance in the Si layer is comparably large because of gap between wiring electrodes (>100 μm).…”

Section: Design and Fabrication Of Tactile Sensormentioning

confidence: 99%

“…In addition, combined proximity and tactile detection is implemented using a single small sensitive element without assembling; hence, no need for multiple systems, which makes space saving and easier arraying possible. We have also developed manipulation system using a miniature electromotive manipulator with this sensor has been constructed [17]. It has been shown that this manipulator system can grip objects without damage or destruction occurred by ‘overshoot just after gripping’, and ‘force control error after gripping’.…”

Section: Introductionmentioning

confidence: 99%

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Miniaturization and High-Density Arrangement of Microcantilevers in Proximity and Tactile Sensor for Dexterous Gripping Control

et al. 2018

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In this paper, in order to perform delicate and advanced grip control like human, a proximity and tactile combination sensor using miniaturized microcantilevers one-fifth the size of previous one as the detection part was newly developed. Microcantilevers were arranged with higher spatial density than in previous works and an interdigitated array electrode to enhance light sensitivity was added. It is found that the interdigitated array electrode can detect light with 1.6 times higher sensitivity than that in previous works and the newly fabricated microcantilevers have enough sensitivity to applied normal and shear loads. Therefore, more accurate detection of proximity distance and spatial distribution of contact force become available for dexterous gripping control to prevent ‘overshooting’, ‘force control error’, and ‘slipping’.

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