A Dual Spiral-Coils Tactile Sensor with Novel Driving Modes for Inductive Force and Capacitive Proximity Sensing

Shih, Fuchi; Lin, Shihwei; Chen, Rongshun; Fang, Weileun

doi:10.1109/mems58180.2024.10439343

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) 2024

DOI: 10.1109/mems58180.2024.10439343

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A Dual Spiral-Coils Tactile Sensor with Novel Driving Modes for Inductive Force and Capacitive Proximity Sensing

Fuchi Shih,

Shihwei Lin,

Rongshun Chen

et al.

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A Dual Spiral-Coils Tactile Sensor with Novel Driving Modes for Inductive Force and Capacitive Proximity Sensing

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