1989
DOI: 10.1107/s002188988900717x
|View full text |Cite
|
Sign up to set email alerts
|

Grazing-incidence small-angle X-ray scattering: new tool for studying thin film growth

Abstract: Grazing‐incidence small‐angle X‐ray scattering (GISAXS) is introduced as a method of studying discontinuous thin films. In this method, the incident beam is totally externally reflected from the substrate followed by small‐angle scattering of the refracted beam by the thin film. The experiment described establishes the ability of GISAXS to provide size information for islands formed in the initial stages of thin film growth. The data presented are for gold films of 7 and 15 Å average thicknesses on Corning 705… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
191
0
1

Year Published

1991
1991
2016
2016

Publication Types

Select...
6
3
1

Relationship

0
10

Authors

Journals

citations
Cited by 287 publications
(192 citation statements)
references
References 9 publications
(13 reference statements)
0
191
0
1
Order By: Relevance
“…Apart from reflectivity and refraction, true small-angle scattering at grazing incidence (i.e. scattering due to the refracted beam, perpendicular to the plane defined by incident and refracted beam) has recently been introduced (Levine, Cohen, Chung & Georgopoulos, 1989) as a very sensitive method for the study of scattering objects on surfaces or at interfaces.…”
Section: Discussionmentioning
confidence: 99%
“…Apart from reflectivity and refraction, true small-angle scattering at grazing incidence (i.e. scattering due to the refracted beam, perpendicular to the plane defined by incident and refracted beam) has recently been introduced (Levine, Cohen, Chung & Georgopoulos, 1989) as a very sensitive method for the study of scattering objects on surfaces or at interfaces.…”
Section: Discussionmentioning
confidence: 99%
“…[20], the surface morphology was investigated in reciprocal space, using the GISAXS method [52,53]. This method relies on the analysis of the angledependent intensity structure of scattered X-rays.…”
Section: B Experimental Methodsmentioning
confidence: 99%
“…Grazing incidence x-ray scattering ͑GIXS͒ provides such information on parallel structures. [25][26][27][28] Due to the peculiar geometry of the experiment, it offers a dramatic enhancement of the signal coming from the probed interface, without significantly sensing the overlaying bulk of solution ͑which is accessible via more conventional x-ray scattering͒. 29 GIXS has gained a lot of interest in the past years since it enables to study interfacial structures in a noninvasive and nondestructive way.…”
Section: Introductionmentioning
confidence: 99%