Gratings with Blaze Angles Down to 0.1° for Photon Energies up to 10 keV

Heidemann, Klaus; Nelles, B.; Lenke, Ralf

doi:10.1063/1.2436104

Cited by 10 publications

(6 citation statements)

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“…After the mechanical ruling process a reactive ion beam etching method [1] was used for further reduction of the blaze angle. The plane Si (100) substrate with dimensions 150 x 25 x 30 mm³ (L x H x W) was gold coated by thermal evaporation.…”

Section: Methodsmentioning

confidence: 99%

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A Plane Blazed Grating for the keV-range

Senf¹,

Reichardt²,

Nelles³

et al. 2007

AIP Conference Proceedings

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Since recent blazed gratings with very shallow blaze angles are technically feasible. This offers the opportunity to explore the keV-x-ray range with gratings. A grating with 200 l/mm and a blaze angle of 0.28° has been manufactured by the Carl Zeiss Company and measured with synchrotron radiation from 1.7 keV to 9 keV at BESSY. The measurements have been performed for different angles of incidence for the lowest diffraction orders. A first order efficiency of up to 40 % can be observed at 2 keV. Even at 8 keV an efficiency of 15 % has been measured which is twice the value obtained from calculations. The latter indicates a lack of the computer code for the higher keV-range.

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Section: Methodsmentioning

confidence: 99%

“…A new patterning technique for blazed gratings has been developed at Carl Zeiss Company [1] allowing for blaze angles down to 0.1°. Generally this range can neither be covered by a grating nor by a crystal monochromator.…”

Section: Introductionmentioning

confidence: 99%

A Plane Blazed Grating for the keV-range

Senf¹,

Reichardt²,

Nelles³

et al. 2007

AIP Conference Proceedings

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“…Only extremely grazing incidence optics can withstand the extreme high power of the laser and avoid surface damage owing to the spread of the power load over a large area. The grazing geometry leads to very low groove density and ultra-low blaze angles of the gratings [8,9]. The maximum photon energy that gratings are used at is limited by the grazing angle required for high reflectivity, leading to a requirement for very small blaze angles.…”

Section: Introductionmentioning

confidence: 99%

“…Since it is challenging to rule perfectly triangular grooves with blazed angles smaller than 3-5°, an additional process of reduction of the blaze angle is required. In this process, the blazed grooves ruled into a metal layer are transferred to the underlying Si substrate by an ion beam etching process [4,8,9]. Owing to the difference in the sputter yield of the metal and Si under bombardment by high energy ions of a noble gas, the transferred grating has a reduced groove depth and a lower blaze angle.…”

Section: Introductionmentioning

confidence: 99%

Ultra-low blaze angle gratings for synchrotron and free electron laser applications

Voronov¹,

Gullikson²,

Padmore³

2018

Opt. Express

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We have developed a method for the manufacture of x-ray diffraction gratings with arbitrarily small blaze angles. These gratings are made by a process in which a high blaze angle grating made by anisotropic etching of Si (111) is subjected to planarization and reactive ion etching. Differential etching of the planarization medium and silicon ensures reduction of the blaze angle. Repeated application of this process leads to gratings of increasing perfection with an arbitrarily small blaze angle. This opens the way to highly efficient low line density gratings, to damage resistant gratings for ultra-high power applications such as free electron lasers, and for extension of the use of gratings into the hard x-ray energy range for dispersive spectroscopy.

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“…Finally, the ruled pattern has been transferred to the silicon substrate by ion beam treatment (Nelles et al, 2001). This process allows for excellent control of the desired blaze angle and in addition an improvement of the final microroughness on the grooves (Heidemann et al, 2007). The blaze angles of the two gratings were chosen to be, in one case, identical to that used for the self-seeding monochromator at Photograph and AFM image of the 0.7 blazed grating sample (top) and the 1.4 blaze grating sample (bottom), after ruling into Au (photograph) and after etching and coating with Pt (AFM images).…”

Section: Samplesmentioning

confidence: 99%

Damage thresholds for blaze diffraction gratings and grazing incidence optics at an X-ray free-electron laser

Krzywiński

Conley

Moeller

et al. 2018

J Synchrotron Radiat

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The Linac Coherent Light Source is upgrading its machine to high repetition rate and to extended ranges. Novel coatings, with limited surface oxidation, which are able to work at the carbon edge, are required. In addition, highresolution soft X-ray monochromators become necessary. One of the big challenges is to design the mirror geometry and the grating profile to have high reflectivity (or efficiency) and at the same time survive the high peak energy of the free-electron laser pulses. For these reasons the experimental damage threshold, at 900 eV, of two platinum-coated gratings with different blazed angles has been investigated. The gratings were tested at 1 grazing incidence. To validate a model for which the damage threshold on the blaze grating can be estimated by calculating the damage threshold of a mirror with an angle of incidence identical to the angle of incidence on the grating plus the blaze angle, tests on Pt-coated substrates have also been performed. The results confirmed the prediction. Uncoated silicon, platinum and SiB 3 (both deposited on a silicon substrate) were also investigated. In general, the measured damage threshold at grazing incidence is higher than that calculated under the assumption that there is no energy transport from the volume where the photons are absorbed. However, it was found that, for the case of the SiB 3 coating, the grazing incidence condition did not increase the damage threshold, indicating that the energy transport away from the extinction volume is negligible.

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Gratings with Blaze Angles Down to 0.1° for Photon Energies up to 10 keV

Cited by 10 publications

References 0 publications

A Plane Blazed Grating for the keV-range

A Plane Blazed Grating for the keV-range

Ultra-low blaze angle gratings for synchrotron and free electron laser applications

Damage thresholds for blaze diffraction gratings and grazing incidence optics at an X-ray free-electron laser

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