“…In case of two sequential LIL exposures of equal intensities I 0 with periods Λ 1 and Λ 2 , proposed e.g. in 24 , the total interference pattern is defined by the sum:Figure 1Scheme of LIL process with two coherent point light sources; λ = 442 nm (He-Cd laser), H = 32.3 cm, D = 69.3 cm, Δ x ~ 100 micron is controlled by linear translation stage. White lines on the resist surface represent the curved interference fringes (family of hyperbolae) in the X-Y plane.…”
Section: Fabrication Of Variable Depth Gratingsmentioning
confidence: 99%
“…Resonances in grating-based optical elements substantially depend on the depth 28 , and in this work we have developed a simple and flexible fabrication technology which allows one to rapidly create apodized structures with adiabatically varying depth. The proposed approach is based on the beats effect and extends the applicability of the known interference approaches 24,25 . The spatial period of the depth variations along the structure can be easily tuned, reaching macroscopic dimensions (several cm) which allows to use unfocused light beams for structure characterization.…”
Section: Introductionmentioning
confidence: 99%
“…The spatial period of the depth variations along the structure can be easily tuned, reaching macroscopic dimensions (several cm) which allows to use unfocused light beams for structure characterization. Our method relaxes requirements imposed on laser interference lithography (LIL) setups for fabrication of apodized gratings 24 , and provides much greater fabrication flexibility in comparison with small angle prism-based approaches 29 .…”
The article focuses on depth-dependent visible band transmission effects in a symmetrical “insulator-metal-insulator” diffraction system based on a variable depth grating. These effects were studied both experimentally and theoretically in TM and TE polarizations. In particular, the existence of an optimized grating depth for plasmon-mediated resonant transmission was confirmed experimentally, and differences in TE and TM transmission behavior are discussed. We utilize a simple and flexible fabrication approach for rapid synthesis of apodized structures with adiabatically varying depth based on a beat pattern of two interferential lithography exposures. The present study can be useful in the fields of transmission-based optical security elements and biosensors.
“…In case of two sequential LIL exposures of equal intensities I 0 with periods Λ 1 and Λ 2 , proposed e.g. in 24 , the total interference pattern is defined by the sum:Figure 1Scheme of LIL process with two coherent point light sources; λ = 442 nm (He-Cd laser), H = 32.3 cm, D = 69.3 cm, Δ x ~ 100 micron is controlled by linear translation stage. White lines on the resist surface represent the curved interference fringes (family of hyperbolae) in the X-Y plane.…”
Section: Fabrication Of Variable Depth Gratingsmentioning
confidence: 99%
“…Resonances in grating-based optical elements substantially depend on the depth 28 , and in this work we have developed a simple and flexible fabrication technology which allows one to rapidly create apodized structures with adiabatically varying depth. The proposed approach is based on the beats effect and extends the applicability of the known interference approaches 24,25 . The spatial period of the depth variations along the structure can be easily tuned, reaching macroscopic dimensions (several cm) which allows to use unfocused light beams for structure characterization.…”
Section: Introductionmentioning
confidence: 99%
“…The spatial period of the depth variations along the structure can be easily tuned, reaching macroscopic dimensions (several cm) which allows to use unfocused light beams for structure characterization. Our method relaxes requirements imposed on laser interference lithography (LIL) setups for fabrication of apodized gratings 24 , and provides much greater fabrication flexibility in comparison with small angle prism-based approaches 29 .…”
The article focuses on depth-dependent visible band transmission effects in a symmetrical “insulator-metal-insulator” diffraction system based on a variable depth grating. These effects were studied both experimentally and theoretically in TM and TE polarizations. In particular, the existence of an optimized grating depth for plasmon-mediated resonant transmission was confirmed experimentally, and differences in TE and TM transmission behavior are discussed. We utilize a simple and flexible fabrication approach for rapid synthesis of apodized structures with adiabatically varying depth based on a beat pattern of two interferential lithography exposures. The present study can be useful in the fields of transmission-based optical security elements and biosensors.
“…One single LIL exposure by two-beam interference creates a sinusoidal intensity distribution with a period Λ on the resist surface: I Λ (x) = I 0 sin (2πx/Λ) + I 0 , where Λ = λ/2 sin α and λ is the laser wavelength. Moiré patterns in 1D appear if another exposure I Λ (x) with Λ ≈ Λ is applied [27]:…”
Section: One-dimensional Lil Moiré Patternsmentioning
confidence: 99%
“…We demonstrate this with gratings of 1 µm, 600 nm and 300 nm period. The resulting microstructures with adiabatically varying depth can be utilized in diffractive optically variable image devices (DOVIDs) for anticounterfeiting measures [27], structurally induced colors [28], plasmonic studies [29] and in general as elements of more sophisticated optical devices.…”
We propose a simple and flexible fabrication approach based on the moiré effect of photoresist gratings for rapid synthesis of apodized structures with continuously varying depth. Minor modifications in a standard laser interference lithography setup allow creating macroscopic, visible by naked eye moiré patterns that modulate the depth of subwavelength diffraction gratings. The spatial frequency of this modulation is easily controlled in a wide range, allowing to create a quasicrystal in extreme cases. Experimental results are confirmed by a theory with clear graphical solutions and numerical modeling. The method is universal and does not depend on a specific choice of photoresist and/or substrate materials, making it a promising choice for structured light applications, optical security elements or as a basic structuring method of complex optical devices.
In the past several years, metasurfaces have emerged as one of the rapidly growing research fields in optics. These ultrathin arrays composed of subwavelength meta-atoms enable precise control of the various aspects of electromagnetic waves and have been proposed for a wide variety of applications such as lenses, polarization control, holography, coloration, spectroscopy, and many more. Due to recent advancements in nanofabrication processes as well as dramatic improvements in the performances of metasurfaces (efficiency, bandwidth, etc.), this technology has matured sufficiently to be incorporated into commercial applications. In this perspective, the various applications of metasurfaces are briefly reviewed, with focus put on the maturity level of the technology and applications for commercialization. First, the principal properties of metasurfaces are introduced, and the various potential applications are reviewed. Then, the maturity level of metasurface technology for these applications is discussed in terms of the potential added value, cost, and timeline. Finally, an outlook of the short-, intermediate-, and long-term opportunities for real-life applications is presented as well as the long-range challenges for future applications.
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