Glow discharge imaging spectroscopy with a novel acousto-optical imaging spectrometer

Voronov, M.; Hoffmann, Volker; Wallendorf, T.; Marke, Swen; Mönch, J.; Engelhard, Mark H.; Büscher, Wolfgang; Ray, Steven J.; Hieftje, Gary M.

doi:10.1039/c2ja10325g

Cited by 16 publications

(22 citation statements)

References 11 publications

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“…At these large dimensions, evolved topography would be smoothed at the transition between adjacent materials; experimental evidence is given later. Relatively large surface heterogeneities are most relevant to glow discharge surfaceimaging techniques [17][18][19][20] , which typically offer spatial resolution on the scale of hundreds of micrometers. Finally, there is no guarantee that plasma conditions will be consistent during elemental analysis of a sample by imaging GD spectrometry.…”

Section: Program To Model Gd Sputtering Of Heterogeneous Materialsmentioning

confidence: 99%

“…Over the past decade, several optical techniques have been developed to view spatially resolved emission across the surface of glow discharge samples. [17][18][19][20] These techniques utilize pulsed glow discharges in 0.1 to 4.0 kPa of argon to temporally and spatially isolate emitting species near where they were sputtered from the surface. Higher pressures shrink the mean free path, which limits the lateral diffusion of atoms in the time between their removal from a sample surface and emission they yield in the negative glow region of the discharge.…”

Section: Introductionmentioning

confidence: 99%

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Emergence and consequences of lateral sample heterogeneity in glow discharge spectrometry

Storey

Ray

Hoffmann

et al. 2016

Spectrochimica Acta Part B: Atomic Spectroscopy

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Conventional glow discharge emission or mass spectrometry requires the assumption that the surface of the sample is homogeneous. However, recent developments in glow discharge imaging appear to offer an opportunity to obtain three-dimensional concentration maps, in which this assumption is no longer necessary. Here, experiments, models, and a summary of earlier work are combined to examine the sputtering behavior of elemental and morphological heterogeneities in a sample. The theoretical model reveals gaps in current knowledge of glow discharge sputtering of heterogeneous samples, particularly indicating that heterogeneity in the sample leads to roughened crater bottoms and how additional morphology can evolve. Additionally, a three-dimensional profiling microscope is used to characterize the effects of surface inclusions on the sputtering process in a DC glow discharge in a reduced-pressure argon environment. Findings have important implications for bulk analysis, depthprofiling, and elemental surface mapping with glow discharge spectrometry.

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Section: Program To Model Gd Sputtering Of Heterogeneous Materialsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Emergence and consequences of lateral sample heterogeneity in glow discharge spectrometry

Storey

Ray

Hoffmann

et al. 2016

Spectrochimica Acta Part B: Atomic Spectroscopy

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show abstract

“…19,20 Voronov et al 21 developed a GD source with which they could analyze samples as large as 8 cm diameter, but found that the source had limitation of power density and pressure. 19,20 Voronov et al 21 developed a GD source with which they could analyze samples as large as 8 cm diameter, but found that the source had limitation of power density and pressure.…”

Section: Introductionmentioning

confidence: 99%

Glow discharge optical emission spectrometry elemental mapping with restrictive anode array masks

Kroschk

Usala

Addesso

et al. 2016

J. Anal. At. Spectrom.

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Large-area surface elemental mapping is highly beneficial for a multitude of applications in fields from materials science to biology. Current typical methods, however, suffer from long acquisition times. Glow Discharge Optical Emission Spectrometry (GDOES), under pulsed-power and higher pressure operation, exhibits a great potential for ultrahigh throughput chemical imaging of large surface area samples. Up until now, various proof-of-principle studies of GDOES elemental mapping have only been applied to smaller surface area samples. Thus, there is a need for development of GDOES systems that allow for analysis of large area samples. Here, the design of different GD configurations for large area sample (10 cm diameter) analysis is investigated as a function of operating conditions such as pressure (133-4000 Pa), applied power (up to 5 kW), and pulsing. An open face electrode (OFE) design generatedundesirable heterogeneous plasma at the higher pressures required for achieving spatial resolution. On the other hand, a restrictive anode array mask (RAAM) design provided notable homogeneity within the same pressure range and enabled the lateral resolution of 1 mm diameter silver inclusions embedded in copper. RAAMS were designed varying thickness (3 mm and 12 mm), aperture size (4, 6, 8 mm), geometry, and grounding. Also, as the section sputtered is restricted to the area covered by the apertures, the RAAM provides the opportunity for subsequent analysis of the unsputtered regions via alternative methods. In addition, the RAAM permits higher power densities to be achieved within the limitations of the power supply. These findings help to pave the way for exploiting the full potential of GDOES and its ultrahigh throughput elemental mapping of large surface area samples.

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“…Accordingly, the latter two techniques are superior for imaging glow-discharge surfaces, in part because they boast high optical throughput. 9,10 The tilting-filter instrument described here further addresses this problem and with less instrumental complexity.…”

Section: Introductionmentioning

confidence: 99%

“…4 Several glow-discharge methods have been devised to enable lateral elemental surface features to be observed. [6][7][8][9][10] Most employ a pulsed discharge so sputtered species cannot move far before the discharge is extinguished, thereby improving spatial resolution. Ehrlich and Hoffmann 7 developed a method to examine a single location in a larger glow discharge.…”

Section: Introductionmentioning

confidence: 99%

Wavelength Scanning with a Tilting Interference Filter for Glow-Discharge Elemental Imaging

et al. 2016

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Glow discharges have long been used for depth profiling and bulk analysis of solid samples. In addition, over the past decade, several methods of obtaining lateral surface elemental distributions have been introduced, each with its own strengths and weaknesses. Challenges for each of these techniques are acceptable optical throughput and added instrumental complexity. Here, these problems are addressed with a tilting-filter instrument. A pulsed glow discharge is coupled to an optical system comprising an adjustable-angle tilting filter, collimating and imaging lenses, and a gated, intensified charge-coupled device (CCD) camera, which together provide surface elemental mapping of solid samples. The tilting-filter spectrometer is instrumentally simpler, produces less image distortion, and achieves higher optical throughput than a monochromator-based instrument, but has a much more limited tunable spectral range and poorer spectral resolution. As a result, the tilting-filter spectrometer is limited to single-element or two-element determinations, and only when the target spectral lines fall within an appropriate spectral range and can be spectrally discerned. Spectral interferences that result from heterogeneous impurities can be flagged and overcome by observing the spatially resolved signal response across the available tunable spectral range. The instrument has been characterized and evaluated for the spatially resolved analysis of glow-discharge emission from selected but representative samples.

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Glow discharge imaging spectroscopy with a novel acousto-optical imaging spectrometer

Cited by 16 publications

References 11 publications

Emergence and consequences of lateral sample heterogeneity in glow discharge spectrometry

Emergence and consequences of lateral sample heterogeneity in glow discharge spectrometry

Glow discharge optical emission spectrometry elemental mapping with restrictive anode array masks

Wavelength Scanning with a Tilting Interference Filter for Glow-Discharge Elemental Imaging

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