Global standardization of scanning probe microscopy

Abstract

Recent efforts to achieve global standardization of scanning probe microscopy (SPM) including noncontact atomic force microscopy (NC-AFM), especially through the International Organization for Standardization (ISO) and related research, are surveyed. Since the unification of terminology for SPM is a prerequisite for standardization, it should have the first priority, followed by the unification of data management and treatment, which will enable access to and processing of SPM data collected by different types of instrument. Among the various SPM analytical methods, the dimensional metrology of SPM is regarded to be the first priority for standardization. This requires solving two basic problems: calibrating the x, y, and z coordinate axes with traceability to the SI unit of length, and eliminating the morphological artefacts caused by the shape of the probe tip. Pre-standardization efforts on restoring distorted images and characterizing the tip shape during use are discussed.

Development of Si/SiO₂ Multilayer Type AFM Tip Characterizers

“…1(a) and Fig. 1(b) [11]. Twelve step L&S structures with trench widths ranging from 7.5 nm to 130 nm were also included in the characterizer as shown in Fig.…”

“…At the same time, tip characterizers have also been reported. Spherical structures such as colloidal gold [4], polystyrene or glass spheres [5,6], nanofabricated spheres [7], hole grid patterns [8], quantum dots [9], dot grid patterns [10], needle-shaped samples [11] and other nanostructures [12] have been demonstrated. However, it is difficult to evaluate the fine shape of an AFM tip, especially that of the sides.…”

Cantilever Tilt Causing Amplitude Related Convolution in Dynamic Mode Atomic Force Microscopy

“…1,2 With the maturity of SPM techniques, SPM quantitative analysis and standardization have become an urgent task in the community of nanoscience and nanotechnology. 3,4 The increasing demands of reproducibility and precision in SPM measurements are triggering not only the advancement of the reference specimens, but also the studies on the modeling for achieving more accurate measurements and analyses.…”

“…3,4 The standard specimen, the theoretical convolution/deconvolution model and the standardized characterization process, are necessary for quantitatively analyzing and reducing this effect. Recently, the dimension of the tip characterizer has been greatly improved by the successful development of a new kind of tip characterizer specimen based on superlattice techniques.…”

Automatic Glitch Elimination of Scanning Probe Microscopy Images

“…Due to the ultrahigh resolution, SPM has been widely used for the visualization of various surface structures at a nanoscale. 1 However, practical SPM images always contain many types of artifacts, such as those induced by tip dilation, 2,3 imperfect scanner behavior (hysteresis, creep and nonlinearity), 4 dynamic properties of the microscope, 5 drift, 6,7 and so on. All of these artifacts will distort the measurements, especially in cases where quantitative evaluations are necessary.…”