Glass polarization induced drift in microelectromechanical capacitor

Abstract

Articles you may be interested inThe effect of polarization fatigue process and light illumination on the transport behavior of Bi0.9La0.1FeO3 sandwiched capacitor J. Appl. Phys. 113, 183510 (2013) We present a quantitative physical model for glass substrate polarization and study the glass polarization by measuring the capacitance drift from microelectromechanical capacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures. V C 2012 American Institute of Physics.[http://dx

Glass Polarization Induced Drift of a Closed-Loop Micro-Accelerometer

“…The polarization of the glass under the DC electrical field can be found in both glass films and solids and the corresponding studies were carried out from the 1960s to the 2010s [ 13 , 14 , 15 , 16 , 17 , 18 , 19 ]. This polarization could induce the reliability issue of RF (Radio Frequency) MEMS switches by forming an extra pulling force between bridge and substrate [ 20 ], and the charge movement caused by polarization could lead to the capacitance drift of micro-capacitors [ 21 ] and the angle drift of micro-mirrors [ 22 ] through changing the equivalent capacitance between two electrodes. In the micro-accelerometers, the migrated charges in glass polarization would form an electrical field to generate electrostatic forces on the silicon electrodes and alter the equilibrium of mass block due to the asymmetrical layout of bulk-machined structures.…”