2010
DOI: 10.1063/1.3413961
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Giant dielectric constant dominated by Maxwell–Wagner relaxation in Al2O3/TiO2 nanolaminates synthesized by atomic layer deposition

Abstract: Nanolaminates consisting of Al2O3 and TiO2 oxide sublayers were synthesized by using atomic layer deposition to produce individual layers with atomic scale thickness control. The sublayer thicknesses were kept constant for each multilayer structure, and were changed from 50 to 0.2 nm for a series of different samples. Giant dielectric constant (∼1000) was observed when the sublayer thickness is less than 0.5 nm, which is significantly larger than that of Al2O3 and TiO2 dielectrics. Detailed investigation revea… Show more

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Cited by 82 publications
(68 citation statements)
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“…The Maxwell-Wagner polarization was widely adopted to explain the high dielectric constant (several hundreds or thousands) observed in the organic or inorganic materials. [41][42][43] The large dielectric constant resulted from Maxwell-Wagner relaxation occurring at two dielectric media or the interfaces of grains and grain boundaries. In organic charge transfer crystals, dielectric constant is very 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 6 small with frequency range from 100 Hz to 100M Hz, as shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…The Maxwell-Wagner polarization was widely adopted to explain the high dielectric constant (several hundreds or thousands) observed in the organic or inorganic materials. [41][42][43] The large dielectric constant resulted from Maxwell-Wagner relaxation occurring at two dielectric media or the interfaces of grains and grain boundaries. In organic charge transfer crystals, dielectric constant is very 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 6 small with frequency range from 100 Hz to 100M Hz, as shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…20 In mixed oxides 21 (Al2O3 and TiO2) and Al2O3 / TiO2 nanolaminates, 22 tailored optical properties varying from Al2O3 to TiO2 with gradual composition change have been demonstrated. Electrical properties 23,24 can be tuned by adjusting either the TiO2 fraction 25,26 or the bilayer thickness 27,28,29,30 or with an interfacial layers. 31 The effect of alloying elements on controlling the grain size is well known in bulk materials.…”
Section: Fig 1 (Color Online)mentioning
confidence: 99%
“…It looks like the peak1 corresponds to BST layer with high dielectric loss peak and hence with low band gap energy whereas the peak2 corresponds to the ZrO 2 layer with low dielectric loss peak and hence with high band gap energy. Two different peaks are also reported in the literature for other multilayered systems [18].…”
Section: Resultsmentioning
confidence: 62%