2013
DOI: 10.1109/lpt.2013.2276479
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Germanium-on-Silicon Mid-Infrared Arrayed Waveguide Grating Multiplexers

Abstract: Abstract-In this letter, we describe the use of a germaniumon-silicon waveguide platform to realize an arrayed waveguide grating (AWG) operating in the 5 µm wavelength range, which can be used as a wavelength multiplexer for mid-infrared (midIR) light engines or as the core element of a midIR spectrometer. Ge-on-Si waveguide losses in the range 2.5-3.5 dB/cm for TE polarized light and 3-4 dB/cm for TM polarized light in the 5.15-5.4 µm wavelength range are reported. A 200 GHz channel spacing 5-channel AWG with… Show more

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Cited by 135 publications
(78 citation statements)
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“…One strategy involves replacing the lossy silicon oxide cladding with other materials exemplified by silicon-on-nitride ( Figure 3A-B) [10] and germanium-on-nitride [17] or with air cladding in pedestal [11,18,19] or suspended silicon structures [12][13][14][20][21][22][23] (Figure 3C-H). Another option is Ge-on-Si (or SiGeon-Si), which claims the advantage of compatibility with Si CMOS processing, as high-quality Ge can be epitaxially grown on Si ( Figure 3I-J) [15,17,[24][25][26][27][28]. Furthermore, the high index of Ge means that the Si substrate can function as the bottom cladding.…”
Section: Waveguides and Passive Devicesmentioning
confidence: 99%
“…One strategy involves replacing the lossy silicon oxide cladding with other materials exemplified by silicon-on-nitride ( Figure 3A-B) [10] and germanium-on-nitride [17] or with air cladding in pedestal [11,18,19] or suspended silicon structures [12][13][14][20][21][22][23] (Figure 3C-H). Another option is Ge-on-Si (or SiGeon-Si), which claims the advantage of compatibility with Si CMOS processing, as high-quality Ge can be epitaxially grown on Si ( Figure 3I-J) [15,17,[24][25][26][27][28]. Furthermore, the high index of Ge means that the Si substrate can function as the bottom cladding.…”
Section: Waveguides and Passive Devicesmentioning
confidence: 99%
“…Mis en forme : Indice µm while using a fully monolithic and robust approach [9][10][11]. Furthermore, the implementation of Ge-based optical systems provides good prospects to develop nonlinear mid-IR optical devices, owing to its larger nonlinear refractive index than Si and the suppression of two-photon absorption in Ge for λ > 3.17 µm [12].…”
Section: Mis En Forme : Indicementioning
confidence: 99%
“…AWGs were also designed in Si 3 N 4 [41] for very near-IR (900 nm) and in Ge-on-Si [42] for mid-IR (5 μm) wavelengths. Both of them showed performance that was comparable to the more mature SOI AWGs, with a CT of 20 dB and insertion loss <2.5 dB.…”
Section: On-chip Spectrometersmentioning
confidence: 99%