Geometrical positioning surveying-based features for BEOL line-end-pull-back modeling using regression-based machine-learning

Hamed, Ahmed M.; Hegazy, Hazem; El-Sewefy, Omar; Dessouky, Mohamed; Salem, Ashraf

doi:10.1117/1.jmm.22.2.023401

J. Micro/Nanopattern. Mats. Metro.

2023

DOI: 10.1117/1.jmm.22.2.023401

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Geometrical positioning surveying-based features for BEOL line-end-pull-back modeling using regression-based machine-learning

Ahmed M. Hamed

Hazem Hegazy²,

Omar El-Sewefy³

et al.

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Geometrical positioning surveying-based features for BEOL line-end-pull-back modeling using regression-based machine-learning

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References 36 publications

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