Generation of a pulsed high-current low-energy beam in a plasma electron source with a self-heated cathode

Гаврилов, Н. В.; Men’shakov, A. I.

doi:10.1134/s1063784216050066

Cited by 16 publications

(9 citation statements)

References 7 publications

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“…For implantation of phosphorus ions in the thin‐film TiO 2 samples, the ion source based on a discharge with the hollow cathode in a magnetic field was used . Red phosphorus powder vaporized as a result of the discharge power dissipation at the cathode.…”

Section: Experimental and Calculation Detailsmentioning

confidence: 99%

“…For implantation of phosphorus ions in the thin-film TiO 2 samples, the ion source based on a discharge with the hollow cathode in a magnetic field was used. [13] Red phosphorus powder vaporized as a result of the discharge power dissipation at the cathode. The source was initially started in an argon, then after heating of the cathode and increase of a partial pressure of phosphorus vapors up to 0.01 Pa gas supply stopped and the source turn to a stable operation in the phosphorus vapors with a dc discharge current of 0.2 A.…”

Section: Experimental and Calculation Detailsmentioning

confidence: 99%

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Mixed Substitution in P‐Doped Anatase TiO₂ Probed by XPS and DFT

Korotin

Boukhvalov

Гаврилов

et al. 2017

Physica Status Solidi (b)

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The investigation of the electronic structure of P‐ion implanted TiO2 thin films (E = 30 keV, D = 1 × 1017 cm−2) with anatase structure is performed by X‐ray photoelectron spectroscopy (XPS) measurements (core levels and valence bands) and first‐principles density functional theory (DFT) calculations. It is found that the XPS P 2p‐spectra reveal the presence of two signals at 134.2 and 130.3 eV which can be attributed to the formation of P–O (with P5+ ions) and P–Ti (with P3− ions) bonds, respectively. This means that both cationic (P → Ti) and anionic (P → O) substitution take place in P‐ion implanted anatase thin films. This conclusion is confirmed by DFT calculations which show that the XPS valence band structure of P:TiO2 can be reproduced only under mixed substitution. The presence of two kinds of phosphorus ions (P5+ and P3−) in ion‐implanted TiO2 can be useful for developing new multifunctional advanced materials with configurable properties for a wide range of applications.

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Section: Experimental and Calculation Detailsmentioning

confidence: 99%

Section: Experimental and Calculation Detailsmentioning

confidence: 99%

Mixed Substitution in P‐Doped Anatase TiO₂ Probed by XPS and DFT

Korotin

Boukhvalov

Гаврилов

et al. 2017

Physica Status Solidi (b)

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“…Arus spot plasma umumnya lebih besar untuk material katoda dengan energi kohesif rendah. Parameter dari spot plasma adalah laju erosi ion (ion erosion rate), sedangkan laju erosi ion merupakan karakteristik dari bahan katoda [8][9][10][11]. Semakin besar arus menuju katoda maka semakin besar spot plasma yang dihasilkan sehingga semakin besar pula material katoda yang tererosi [12][13][14][15].…”

Section: Hasil Dan Pembahasanunclassified

Penentuan Massa Tererosi Untuk Berbagai Material Katoda Ignitor

M.¹,

Anggraini²,

Aziz³

2017

gnd

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ABSTRAKPENENTUAN MASSA TEREROSI UNTUK BERBAGAI MATERIAL KATODA IGNITOR. Sistem elektroda ignitor yang berfungsi menginisiasi lucutan plasma terdiri dari dua buah elektroda ignitor yang dilengkapi dengan satu unit sistem catudaya lucutan ignitor (Ignitor Discharge Power Supply) dengan 2 trafo flyback, dimana inti ferit flyback masing-masing berdiameter 1,3 cm dan 1,5 cm sehingga diperoleh arus spot plasma yang berbeda untuk kedua sistem elektroda ignitor. Arus spot plasma tergantung pada jenis material katoda. Semakin besar arus menuju katoda maka semakin besar spot plasma yang dihasilkan sehingga semakin besar pula material katoda yang tererosi. Dalam penelitian ini dilakukan uji fungsi sistem elektroda ignitor, dan dari hasil uji fungsi dapat ditentukan besarnya massa dan partikel material katoda ignitor yang tererosi untuk menentukan umur katoda akibat hilangnya bahan di permukaan katoda setelah terbentuk spot plasma. Hasil pengujian spot plasma pada permukaan katoda ignitor menggunakan material Mg, diperoleh arus spot plasma 13 A dan lebar pulsa 38 µdet, sedangkan untuk material Ag, Al, Cd dan Cu masing-masing diperoleh arus spot plasma 14,32 A, 12,34 A, 12,56 A dan 10,58 A lebar pulsa 22 µdet, 39 µdet, 38 µdet, dan 34 µdet. Material katoda yang paling baik untuk sistem elektroda ignitor adalah magnesium karena mempunyai laju erosi γ paling rendah (11,7 µg/C) sehingga tidak mudah tererosi dan rusak. Dari hasil pengujian spot plasma diperoleh massa katoda tererosi untuk material Mg yang paling rendah yaitu 5,78 nano gram dan katoda akan berkurang sepanjang 11,75 μm, sedangkan massa katoda tererosi paling tinggi adalah Cd (laju erosi 43,9 µg/C) sebesar 20,95 nano gram, dimana katoda akan berkurang sepanjang 85,67 μm

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“…Thermionic cathodes are used in deposition devices of this type as an electron emitter, usually, which quickly degrade in chemically active gases; therefore, thermionic vacuum arc (TVA) method is mainly used for deposition of metal coatings [1]. To obtain binary coatings by reactive evaporation, arcs with a self-heating hollow cathode (SHC) are used, which are able to function stably for a long time under conditions of pumping an inert gas (or N2) through the cathode cavity and supplying the reaction gas to the discharge gap [2], both in continuous and pulse-periodic (10-1000 Hz, 10-100 ms) modes [3]. Oxide [4], nitride [5], and composite [6] coatings are obtained by reaction anode evaporation in a discharge with SHC at a rate of more than 1 μm/h.…”

Section: Introductionmentioning

confidence: 99%

Diagnostics of a low-pressure arc plasma (N2, 0.1–1 Pa) in the mode of aluminum anodic evaporation

Ershov¹,

Kamenetskikh²

2022

8th International Congress on Energy Fluxes and Radiation Effects

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The use of an arc with a thermionic cathode burning in vapors of the anode material for the coating deposition provides high deposition rates, a controlled level of ion assistance, and the absence of microdroplets characteristic of a cathode arc. The use for this purpose of a low-pressure arc with a self-heating hollow cathode makes it possible to use an active gaseous medium for the synthesis of binary coatings, for example, nitride or oxide coatings. The rate of deposition of such coatings, their structure, and properties depend on such parameters of the discharge plasma as the plasma density and its electron temperature, the anode potential drop, the mass composition of the plasma, the degree of vapor ionization, and the degree of reactive gas dissociation. In this work, to diagnose the discharge plasma, probe diagnostics and optical emission spectroscopy were used. The results of measurements obtained in wide ranges of discharge current (5–30 A), reactive gas pressure (N2, 0.1–1 Pa), and evaporation rate of Al ((1.4–18)·10-5 g/cm2·s) are presented.

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Generation of a pulsed high-current low-energy beam in a plasma electron source with a self-heated cathode

Cited by 16 publications

References 7 publications

Mixed Substitution in P‐Doped Anatase TiO₂ Probed by XPS and DFT

Mixed Substitution in P‐Doped Anatase TiO₂ Probed by XPS and DFT

Penentuan Massa Tererosi Untuk Berbagai Material Katoda Ignitor

Diagnostics of a low-pressure arc plasma (N2, 0.1–1 Pa) in the mode of aluminum anodic evaporation

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Generation of a pulsed high-current low-energy beam in a plasma electron source with a self-heated cathode

Cited by 16 publications

References 7 publications

Mixed Substitution in P‐Doped Anatase TiO2 Probed by XPS and DFT

Mixed Substitution in P‐Doped Anatase TiO2 Probed by XPS and DFT

Penentuan Massa Tererosi Untuk Berbagai Material Katoda Ignitor

Diagnostics of a low-pressure arc plasma (N2, 0.1–1 Pa) in the mode of aluminum anodic evaporation

Contact Info

Product

Resources

About

Mixed Substitution in P‐Doped Anatase TiO₂ Probed by XPS and DFT

Mixed Substitution in P‐Doped Anatase TiO₂ Probed by XPS and DFT