Abstract:The use of an arc with a thermionic cathode burning in vapors of the anode material for the coating deposition provides high deposition rates, a controlled level of ion assistance, and the absence of microdroplets characteristic of a cathode arc. The use for this purpose of a low-pressure arc with a self-heating hollow cathode makes it possible to use an active gaseous medium for the synthesis of binary coatings, for example, nitride or oxide coatings. The rate of deposition of such coatings, their structure, … Show more
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