1999
DOI: 10.1063/1.371633
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Generalized analysis of quasi-steady-state and quasi-transient measurements of carrier lifetimes in semiconductors

Abstract: Recently, a simple yet powerful carrier lifetime technique for semiconductor wafers has been introduced that is based on the simultaneous measurement of the light-induced photoconductance of the sample and the corresponding light intensity [Appl. Phys. Lett. 69, 2510 (1996)]. In combination with a light pulse from a flash lamp, this method allows the injection level dependent determination of the effective carrier lifetime in the quasi-steady-state mode as well as the quasi-transient mode. For both cases, appr… Show more

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Cited by 309 publications
(141 citation statements)
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“…A circular ITO target with a composition of In 2 O 3 /SnO 2 : 90/10 weight percent, a diameter of 30 cm and a purity of 99.99 % was utilized and additional oxygen was introduced along with argon during the sputter process, which dosage allows for controlling the density of electrons in the conduction band of the deposited film. The sputter-induced damage of well-passivated lifetime samples was evaluated via photo conductance measured by the Sinton WCT-120 tool operated in generalized mode [13] and quantified by the corresponding iV oc values at one sun illumination averaged for at least two samples. The TOPCon lifetime samples consisted of 200 μm thick n-type silicon FZ wafers with a resistivity of 1 Ωcm (Fig.…”
Section: Methodsmentioning
confidence: 99%
“…A circular ITO target with a composition of In 2 O 3 /SnO 2 : 90/10 weight percent, a diameter of 30 cm and a purity of 99.99 % was utilized and additional oxygen was introduced along with argon during the sputter process, which dosage allows for controlling the density of electrons in the conduction band of the deposited film. The sputter-induced damage of well-passivated lifetime samples was evaluated via photo conductance measured by the Sinton WCT-120 tool operated in generalized mode [13] and quantified by the corresponding iV oc values at one sun illumination averaged for at least two samples. The TOPCon lifetime samples consisted of 200 μm thick n-type silicon FZ wafers with a resistivity of 1 Ωcm (Fig.…”
Section: Methodsmentioning
confidence: 99%
“…The second method, i.e., QSSPC, measures the balance between generation and recombination when a quasisteady-state illumination is maintained. The generalized lifetime [8] is then extracted as…”
Section: Theoretical Principlesmentioning
confidence: 99%
“…Following this, the samples were consecutively subjected to isothermal annealing treatments in air for prolonged times t ann . The value for the effective carrier lifetime eff of the samples was measured with a Sinton Consulting WCT-100 quasi-steady-state photoconductance system, 17 operated either in the so-called generalized, 18 or transient mode. For this, the annealing treatments were shortly interrupted.…”
mentioning
confidence: 99%